# US 11,907,805 B2 · Three-dimensional superconducting qubit and a method for manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,907,805 B2 - Document ID: US11907805B2 - Status: Granted - Kind: B2 - Application number: 17/495,085 - Filed: 2021-10-06 - Published: 2022-05-26 - Granted: 2024-02-20 - Earliest claimed: 2020-11-23 - Assignees: IQM Finland Oy - Applicants: IQM Finland Oy - Inventors: Caspar Ockeloen-Korppi; Tianyi Li; Wei Liu; Vasilii Sevriuk; Tiina Naaranoja; Mate Jenei; Jan Goetz; Kuan Yen Tan; Mikko Möttönen; Kok Wai Chan - Web page: https://patentgrep.com/patent/US11907805B2 ## CPC - G06N 10/20: Models of quantum computing, e.g. quantum circuits or universal quantum computers - G06N 10/40: Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control - H10N 60/01: Manufacture or treatment - H10N 60/0912: {of Josephson-effect devices} - H10N 60/12: Josephson-effect devices - H10N 60/805: {for Josephson-effect devices} - H10N 69/00: Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00 - G06N: COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract A three-dimensional superconducting qubit and a method for manufacturing the same are disclosed. In an example, a three-dimensional superconducting qubit comprises a structural base comprising one or more insulating materials, and superconductive patterns on surfaces of the structural base. The superconductive patterns form at least a capacitive part and an inductive part of the three-dimensional superconducting qubit. A first surface of the surfaces of the structural base defines a first plane and a second surface of the surfaces of the structural base defines a second plane, the second plane being oriented differently than the first plane. At least one superconductive pattern of the superconductive patterns extends from the first surface to the second surface. ## Claims ### Claim 1 A three-dimensional superconducting qubit comprising: a structural base comprising one or more insulating materials; and at least two superconductive patterns on at least three surfaces of the structural base, including a first surface, a second surface, and a third surface, the at least two superconductive patterns forming at least a capacitive part and an inductive part of the three-dimensional superconducting qubit, wherein the first surface of the structural base defines a first plane having a similar orientation as that of a top surface of the structural base, wherein the second surface of the structural base defines a second plane that is oriented differently than the first plane, wherein the third surface of the structural base defines a third plane that is oriented differently than the first plane and the second plane, and wherein a first pattern of the at least two superconductive patterns extends from the first surface to the second surface and a second pattern of the at least two superconductive patterns extends from the first surface to the third surface. ### Claim 2 (depends on 1) The three-dimensional superconducting qubit of claim 1, wherein: the structural base comprises a planar substrate, a substrate surface of the planar substrate having the same orientation as the first surface; the second surface is one wall of a trench that extends into a bulk of the planar substrate; and the trench is defined by walls that face each other across a void of the trench so that the first pattern is at least partly located on a wall of the trench. ### Claim 3 (depends on 2) The three-dimensional superconducting qubit of claim 2, wherein: a portion of the substrate surface is covered by a superconductive ground plane; and the superconductive ground plane continues onto one wall of the trench, different than the second surface, so that the part of the first pattern on the second surface and the part of the superconductive ground plane that continues onto a wall of the trench face each other across the void of the trench. ### Claim 4 (depends on 3) The three-dimensional superconducting qubit of claim 3, wherein the inductive part of the three-dimensional superconducting qubit is located in the plane defined by the substrate surface. ### Claim 5 (depends on 3) The three-dimensional superconducting qubit of claim 3, wherein the inductive part of the three-dimensional superconducting qubit is located in the first plane, wherein the first plane is parallel to the substrate surface but located at a bottom of the trench. ### Claim 6 (depends on 3) The three-dimensional superconducting qubit of claim 3, wherein the trench has a plurality of wall surfaces that define a sequence of differently oriented planes, so that an aperture at which the trench opens to the substrate surface constitutes a meandering or embattled pattern in the substrate surface. ### Claim 7 (depends on 6) The three-dimensional superconducting qubit of claim 6, wherein the meandering or embattled pattern comprises a plurality of repetitive back and forth sections, so that the trench is limited by a plurality of interleaved protrusions, one group of which comprises portions of the at least two superconductive patterns while another group comprises portions of extensions of the superconductive ground plane. ### Claim 8 (depends on 2) The three-dimensional superconducting qubit of claim 2, wherein the trench is at least partly filled with dielectric filler material other than the substrate. ### Claim 9 (depends on 8) The three-dimensional superconducting qubit of claim 8, wherein: the first pattern continues from the wall of the trench onto a bottom of the trench, being covered there by the dielectric filler material; and a conductive or superconductive pattern extends from the substrate surface onto a top of the dielectric filler material. ### Claim 10 (depends on 1) The three-dimensional superconducting qubit of claim 1, wherein: the structural base comprises a planar substrate, a substrate surface of the planar substrate having the same orientation as the first surface; the structural base comprises a piece of insulating material protruding out of the substrate surface; and the second surface is one wall of the piece of insulating material so that the first pattern is at least partly located on a wall of the piece of insulating material. ### Claim 11 (depends on 10) The three-dimensional superconducting qubit of claim 10, wherein the inductive part of the three-dimensional superconducting qubit is located in a plane defined by a surface of the piece of insulating material. ### Claim 12 (depends on 11) The three-dimensional superconducting qubit of claim 11, wherein: the piece of insulating material has a top surface that is parallel to the substrate surface but displaced from it; and the inductive part of the three-dimensional superconducting qubit is located on the top surface. ### Claim 13 A quantum computing circuit comprising at least one three-dimensional superconducting qubit, wherein the at least one three-dimensional superconducting qubit comprises: a structural base comprising one or more insulating materials; and at least two superconductive patterns on at least three surfaces of the structural base, including a first surface, a second surface, and a third surface, the at least two superconductive patterns forming at least a capacitive part and an inductive part of the at least one three-dimensional superconducting qubit, wherein the first surface of the structural base defines a first plane having a similar orientation as that of a top surface of the structural base, wherein the second surface of the structural base defines a second plane that is oriented differently than the first plane, wherein the third surface of the structural base defines a third plane that is oriented differently than the first plane and the second plane, and wherein a first pattern of the at least two superconductive patterns extends from the first surface to the second surface and a second pattern of the at least two superconductive patterns extends the from the first surface to the third surface. ### Claim 14 (depends on 13) The quantum computing circuit of claim 13, wherein: the structural base comprises a planar substrate, a substrate surface of the planar substrate having the same orientation as the first surface; the quantum computing circuit comprises one or more superconductive tracks on the substrate surface; and at least one of the superconductive tracks has an end adjacent to the at least one three-dimensional superconducting qubit for making a non-galvanic coupling to or from the at least one three-dimensional superconducting qubit. ### Claim 15 (depends on 14) The quantum computing circuit of claim 14, wherein: the second surface is one wall of a trench that extends into a bulk of the planar substrate, so that the first pattern is at least partly located on a wall of the trench; and the end of the at least one superconductive track extends onto another wall of the trench. ### Claim 16 A method for manufacturing a three-dimensional superconducting qubit, the method comprising: providing a structural base of one or more insulating materials, the structural base comprising at least three surfaces including a first surface, a second surface, and a third surface, wherein the first surface of the structural base defines a first plane having a similar orientation as that of a top surface of the structural base, wherein the second surface of the structural base defines a second plane that is oriented differently than the first plane, and wherein the third surface of the structural base defines a third plane that is oriented differently than the first plane and the second plane; and depositing superconductive material on the at least three surfaces of the structural base that define the first plane and the second plane, the superconductive material being deposited in at least two superconductive patterns that form at least a capacitive part and an inductive part of the three-dimensional superconducting qubit, wherein a first pattern of the at least two superconductive patterns is made to extend from the first surface that defines the first plane to the second surface that defines the second plane and a second pattern of the at least two superconductive patterns extends the from the first surface that defines the first plane to the third surface that defines the third plane. ### Claim 17 (depends on 16) The method of claim 16, wherein providing the structural base comprises making a trench in an otherwise planar substrate surface, so that one wall of the trench becomes the surface that defines the second plane. ### Claim 18 (depends on 16) The method of claim 16, wherein providing the structural base comprises depositing a piece of insulating material onto an otherwise planar substrate surface, so that one wall of the piece of insulating material becomes the surface that defines the second plane. ### Claim 19 (depends on 16) The method of claim 16, wherein depositing the superconductive material comprises using an anisotropic deposition method such as electron beam evaporation to deposit the superconductive material as a non-uniform layer on surfaces of the structural base.