# US 11,906,906 B2 · Metrology method and associated metrology and lithographic apparatuses

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- Number: US 11,906,906 B2
- Document ID: US11906906B2
- Status: Granted
- Kind: B2
- Application number: 17/565,422
- Filed: 2021-12-29
- Published: 2022-04-21
- Granted: 2024-02-20
- Earliest claimed: 2019-07-02
- Assignees: ASML Netherlands B.V.
- Applicants: Asml Netherlands B.V.
- Inventors: Sebastianus Adrianus Goorden; Simon Reinald Huisman; Arjan Johannes Anton Beukman
- Web page: https://patentgrep.com/patent/US11906906B2

## CPC

- G03F 7/70625: {Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness}
- G03F 7/70616: {Monitoring the printed patterns}
- G03F 7/70633: {Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching}
- G03F 7/70641: {Focus}
- G03F 7/70683: {Mark designs}
- H10P 74/203: {Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects}
- H10P 74/27: {Structural arrangements therefor}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Disclosed is a method of metrology comprising using measurement illumination to measure a target, said measurement illumination comprising a plurality of illumination conditions. The method comprises performing a first measurement capture with a first subset of said plurality of illumination conditions, e.g., each comprising a positive weighting, to obtain a first parameter value and performing a second measurement capture with a second subset of said plurality of illumination conditions, e.g., each comprising a negative weighting, to obtain a second parameter value. An optimized parameter value is determined as a weighted combination of at least the first parameter value and the second parameter value.

## Claims

### Claim 1

A method of metrology comprising using measurement illumination to measure a target, said measurement illumination comprising a plurality of illumination conditions; said method comprising:
performing a first measurement capture with a first subset of said plurality of illumination conditions, to obtain a first parameter value;
performing a second measurement capture with a second subset of said plurality of illumination conditions, to obtain a second parameter value; and
determining an optimized parameter value as a weighted combination of at least the first parameter value and the second parameter value,
wherein said first subset of said plurality of illumination conditions each comprise a positive weighting and said second subset of said plurality of illumination conditions each comprise a negative weighting.

### Claim 2 (depends on 1)

The method of claim 1, wherein the plurality of illumination conditions comprises at least a plurality of different wavelengths.

### Claim 3 (depends on 2)

The method of claim 2, wherein each of said first subset of said plurality of illumination conditions and said second subset of said plurality of illumination conditions each comprise a first polarization state and the method further comprises:
performing a third measurement capture with a third subset of said plurality of illumination conditions each comprising a second polarization state and a positive weighting, to obtain a third parameter value; and
performing a fourth measurement capture with a fourth subset of said plurality of illumination conditions each comprising a second polarization state and a negative weighting, to obtain a fourth parameter value.

### Claim 4 (depends on 3)

The method of claim 3, wherein said first subset of said plurality of illumination conditions, said second subset of said plurality of illumination conditions, said third subset of said plurality of illumination conditions and said fourth subset of said plurality of illumination conditions comprise non-overlapping proper subsets of said plurality of illumination conditions.

### Claim 5 (depends on 3)

The method of claim 3, wherein determining the optimized parameter value comprises determining a weighted combination of the first parameter value, second parameter value, third parameter value, and fourth parameter value.

### Claim 6 (depends on 3)

The method of claim 3, wherein each of said positive weighting and negative weighting is imposed by relative weighting of the intensities of each illumination condition of the corresponding subset of said illumination conditions.

### Claim 7 (depends on 1)

The method of claim 1, wherein said plurality of illumination conditions comprises a plurality of different wavelength and polarization combinations.

### Claim 8 (depends on 7)

The method of claim 7, wherein, for each of the first subset of illumination conditions and second subset of illumination conditions: the illumination conditions comprising a first polarization setting are selected using a first tunable filter and the illumination conditions comprising a second polarization setting are selected using a second tunable filter, with output beams from the first tunable filter and second tunable filter being subsequently combined prior to the measurement capture.

### Claim 9 (depends on 7)

The method of claim 7, wherein the plurality of illumination conditions comprises a plurality of different angular illumination spectra.

### Claim 10 (depends on 1)

The method of claim 1, wherein each of said positive weighting and negative weighting is imposed by relative weighting of the intensities of each illumination condition of the corresponding subset of said illumination conditions.

### Claim 11 (depends on 1)

The method of claim 1, further comprising performing an initial training phase to determine said subsets and/or said weightings.

### Claim 12 (depends on 11)

The method of claim 11, wherein performing the initial training phrase comprises:
generating training data comprises separately measuring parameter values for a plurality of illumination conditions of sufficient number that sufficient representative process variations will be present for training; and
determining the subsets and/or said weightings from the training data.

### Claim 13 (depends on 12)

The method of claim 12, wherein determining the subsets and/or said weightings from the training data comprises determining an optimized subset of illumination conditions and respective weights such that:
a measure quality metric after hypothetical exposure based on the optimized parameter value corresponding to the optimized subset of illumination conditions and respective weights is minimized; or
the optimized parameter value corresponding to the optimized subset of illumination conditions and respective weights correlates strongly with variations in measured plots of variation in the parameter value with wavelength which are attributable to an actual value of the parameter being determined.

### Claim 14 (depends on 1)

The method of claim 1, further comprising performing an alignment to determine a position value for a substrate, said optimized parameter value comprising an optimized position value.

### Claim 15 (depends on 1)

The method of claim 1, further comprising performing an overlay or focus metrology method, wherein said optimized parameter value comprises an optimized overlay value or focus value.

### Claim 16 (depends on 1)

A metrology device operable to perform the method of claim 1.

### Claim 17 (depends on 16)

The metrology device of claim 16, further comprising an illumination system for providing the measurement illumination; and
at least one tunable filter for selecting each subset of said plurality of illumination conditions.

### Claim 18 (depends on 16)

A lithographic apparatus comprises the metrology device of claim 16.

### Claim 19 (depends on 1)

A lithographic apparatus comprising:
a patterning device support for supporting a patterning device;
a substrate support for supporting a substrate; and
a metrology device being operable to perform the method of claim 1.