# US 11,906,874 B1 · Acousto-optic deflector and methods of fabrication

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- Number: US 11,906,874 B1
- Document ID: US11906874B1
- Status: Granted
- Kind: B1
- Application number: 18/132,034
- Filed: 2023-04-07
- Granted: 2024-02-20
- Earliest claimed: 2023-04-07
- Assignees: IntraAction Corp.
- Applicants: Allen Gilbert; John Lekavich
- Inventors: Allen Gilbert; John Lekavich
- Web page: https://patentgrep.com/patent/US11906874B1

## CPC

- H04B 10/503: {Laser transmitters}
- B23K 26/032: {using optical means}
- B23K 26/067: Dividing the beam into multiple beams, e.g. multi-focusing
- B23K 26/082: Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K 26/359: by providing a line or line pattern, e.g. a dotted break initiation line
- B23K 26/384: of specially shaped holes
- D06M 10/005: {Laser beam treatment}
- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G02B 21/0068: {arrangements using polarisation}
- G02B 21/0076: {arrangements using fluorescence or luminescence}
- G02F 1/11: based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves (acousto-optical deflection G02F1/33)
- G02F 1/113: {Circuit or control arrangements}
- G02F 1/292: {by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31)}
- G02F 1/33: Acousto-optical deflection devices {(circuit or control arrangements therefor G02F1/113)}
- G02F 1/332: {comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell}
- H01S 3/0057: {Temporal shaping, e.g. pulse compression, frequency chirping (soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108)}
- H01S 3/0085: {Modulating the output, i.e. the laser beam is modulated outside the laser cavity}
- H01S 3/1123: Q-switching
- H01S 3/115: using intracavity electro-optic devices
- H01S 3/117: using intracavity acousto-optic devices
- H04B 10/25: Arrangements specific to fibre transmission
- B23K 2103/38: {Fabrics; Fibrous materials}
- B23K 2103/56: {being semiconducting}
- H04B: TRANSMISSION
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- D06M: TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

An acousto-optic deflector includes an optical element having a surface with one or more steps formed thereon; a conductive layer formed on the surface with the steps; one or more crystals secured to each step; and electrodes positioned on each surface of each crystal.

## Claims

### Claim 1

An acousto-optic deflector, comprising:
an optical element having a surface with one or more steps formed thereon;
a conductive layer formed on the surface with the steps;
first and second transducers electrically coupled in parallel and bonded to the optical element using an epoxy; and
first and second radio frequency (RF) input electrodes positioned on first and second transducers, wherein the first RF input electrode selects a first deflection response and the second RF input electrode selects a second deflection response.

### Claim 2 (depends on 1)

The deflector of claim 1, comprising a tuning element to match a predetermined impedance.

### Claim 3 (depends on 1)

The deflector of claim 1, comprising a tuning element providing an output impedance of 50 ohms.

### Claim 4 (depends on 1)

The deflector of claim 1, comprising a tuning element including inductive and capacitive passive components.

### Claim 5 (depends on 1)

The deflector of claim 1, comprising tuning element comprises 1:1 balun, 4:1 transformer, a capacitor, and an inductor.

### Claim 6 (depends on 1)

The deflector of claim 1, wherein the optical element comprises a slanted end.

### Claim 7 (depends on 6)

The deflector of claim 6, wherein the slanted end comprises a compound angle to move reflected sound field out of a laser beam working range.

### Claim 8 (depends on 1)

The deflector of claim 1, wherein the slanted end forms a 30 degree angle measured from a long side of the optical element to a short side of the optical element.

### Claim 9 (depends on 1)

The deflector of claim 1, wherein a surface of the slanted end comprises a 2 degree slope.

### Claim 10 (depends on 1)

The deflector of claim 1, wherein the optical element comprises germanium, tellurium dioxide (TeO2), lithium niobate, PZT, fused silica, chalcogenide glasses, glass.

### Claim 11 (depends on 1)

The deflector of claim 1, wherein the tuning element matches a deflector output impedance at 40 MHz and at 60 MHz to a 50 ohm impedance.

### Claim 12

A method to form a phased-array transducer, comprising: grinding an optical element to form two or more steps each with a predetermined height; depositing a conductive layer over the two or more steps; attaching first and second crystals or transducers electrically coupled in parallel on the two or more steps; and attaching first and second radio frequency (RF) electrodes to the transducers, wherein the first and second RF electrodes positioned on the first and second transducers, wherein the first RF electrode selects a first deflection response and the second RF electrode selects a second deflection response.

### Claim 13 (depends on 1)

The method of claim 1, comprising matching the input of the transducers to a predetermined impedance.

### Claim 14 (depends on 1)

The method of claim 1, comprising providing a tuning element coupled to the transducers with an output impedance of 50 ohms.

### Claim 15 (depends on 1)

The method of claim 1, comprising a tuning element including inductive and capacitive passive components.

### Claim 16 (depends on 1)

The method of claim 1, comprising tuning element comprises a 1:1 balun, a 4:1 transformer, a capacitor, and an inductor.

### Claim 17 (depends on 1)

The deflector of claim 1, wherein the optical element comprises a slanted end, wherein the slanted end comprises a compound angle to move reflected sound field out of a laser beam working range, wherein the slanted end forms a 30 degree angle measured from a long side of the optical element to a short side of the optical element, and wherein a surface of the slanted end comprises a 2 degree slope.

### Claim 18 (depends on 1)

The deflector of claim 1, wherein the optical element comprises germanium, tellurium dioxide (TeO2), lithium niobate, PZT, fused silica, chalcogenide glasses, glass.

### Claim 19 (depends on 1)

The deflector of claim 1, wherein the tuning element matches a deflector output impedance at 40 MHz and at 60 MHz to a 50 ohm impedance.

### Claim 20

A method to deflect a laser beam, comprising:
applying the laser beam to an optical element having one or more steps each with a predetermined height and first and second crystals or transducers electrically coupled in parallel on the one or more steps with first and second radio frequency (RF) electrodes positioned on the first and second transducers, wherein
the first RF electrode selects a first deflection response and the second RF electrode selects a second deflection response; impedance matching the electrical input of the transducers to a 50-ohm load; providing an electrical input to deflect the laser at the two or more frequencies; and generating a sound field in the optical element to deflect a laser beam based on two or more frequencies.