# US 11,906,726 B2 · Micromachined mirror assembly having micro mirror array and hybrid driving method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,906,726 B2 - Document ID: US11906726B2 - Status: Granted - Kind: B2 - Application number: 17/464,401 - Filed: 2021-09-01 - Published: 2021-12-23 - Granted: 2024-02-20 - Earliest claimed: 2018-12-18 - Assignees: Beijing Voyager Technology Co., Ltd. - Applicants: Beijing Voyager Technology Co., Ltd. - Inventors: Qin Zhou; Youmin Wang - Web page: https://patentgrep.com/patent/US11906726B2 ## CPC - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means} - G01S 7/4817: {relating to scanning} - G01S 7/4863: Detector arrays, e.g. charge-transfer gates - G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32) - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - G01S 17/931: of land vehicles - G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means} - G02B 26/0858: {the reflecting means being moved or deformed by piezoelectric means} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES ## Abstract Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis. ## Claims ### Claim 1 A scanning mirror assembly of an optical sensing system, comprising: a frame comprising: a first post and a second post arranged in parallel and separated by a gap; and a set of beams coupled perpendicularly to the first post and positioned in the gap between the first post and the second post; and an array of micro mirrors coupled to the frame, wherein the array of micro mirrors tilt in a synchronized manner around a mirror tilting axis when the first post and the second post are positioned in different vertical planes. ### Claim 2 (depends on 1) The scanning mirror assembly of claim 1, wherein a first end of the array of micro mirrors are coupled to the set of beams. ### Claim 3 (depends on 2) The scanning mirror assembly of claim 2, wherein: the array of micro mirrors tilt around the mirror tilting axis in a first direction when the first post is elevated above the second post. ### Claim 4 (depends on 3) The scanning mirror assembly of claim 3, wherein: the array of micro mirrors tilt around the mirror tilting axis in a second direction opposite to the first direction when the second post is elevated above the first post. ### Claim 5 (depends on 2) The scanning mirror assembly of claim 2, wherein: a second end of the array of micro mirrors is coupled to the second post, and the second end is opposite the first end. ### Claim 6 (depends on 5) The scanning mirror assembly of claim 5, wherein the second end of the array of micro mirrors is coupled to the second post at a single point of attachment. ### Claim 7 (depends on 6) The scanning mirror assembly of claim 6, wherein the single point of attachment is located on a side surface of the array of micro mirrors parallel to the second post. ### Claim 8 A scanner of an optical sensing system, comprising: a scanning mirror assembly comprising: a frame comprising: a first post and a second post arranged in parallel and separated by a gap; and a set of beams coupled perpendicularly to the first post and positioned in the gap between the first post and the second post; and an array of micro mirrors coupled to the frame wherein the array of micro mirrors tilt in a synchronized manner around a mirror tilting axis when the first post and the second post are positioned in different vertical planes; and a first driver configured to drive the array of micro mirrors to tilt in the synchronized manner around the mirror tilting axis by causing the second post to be raised and lowered. ### Claim 9 (depends on 8) The scanner of claim 8, wherein a first end of the array of micro mirrors are coupled to the set of beams. ### Claim 10 (depends on 9) The scanner of claim 9, wherein the array of micro mirrors tilt around the mirror tilting axis in a first direction when the first post is elevated above the second post. ### Claim 11 (depends on 10) The scanner of claim 10, wherein the array of micro mirrors tilt around the mirror tilting axis in a second direction opposite to the first direction when the second post is elevated above the first post. ### Claim 12 (depends on 9) The scanner of claim 9, wherein: a second end of the array of micro mirrors is coupled to the second post, and the second end is opposite the first end. ### Claim 13 (depends on 12) The scanner of claim 12, wherein the second end of the array of micro mirrors is coupled to the second post at a single point of attachment. ### Claim 14 (depends on 13) The scanner of claim 13, wherein the single point of attachment is located on a side of the array of micro mirrors parallel to the second post. ### Claim 15 (depends on 9) The scanner of claim 9, wherein: the scanning mirror assembly further comprises a base, and the array of micro mirrors are affixed to the base. ### Claim 16 (depends on 15) The scanner of claim 15, wherein the scanning mirror assembly further comprises a second driver configured to drive the base to tilt around a base tilting axis. ### Claim 17 (depends on 16) The scanner of claim 16, wherein the base tilting axis is perpendicular to the mirror tilting axis. ### Claim 18 (depends on 16) The scanner of claim 16, wherein the array of micro mirrors are configured to additionally tilt around the base tilting axis as the base tilts. ### Claim 19 (depends on 16) The scanner of claim 16, wherein: the array of micro mirrors are configured to tilt around the mirror tilting axis at a first frequency, and the base is configured to tilt around the base tilting axis at a second frequency less than the first frequency. ### Claim 20 A transmitter of an optical sensing system, comprising: a light source configured to emit a laser beam; and a scanner configured to steer the laser beam towards an object, wherein the scanner comprises: a scanning mirror assembly comprising: a frame comprising: a first post and a second post arranged in parallel and separated by a gap; and a set of beams coupled perpendicularly to the first post and positioned in the gap between the first post and the second post; and an array of micro mirrors coupled to the frame wherein the array of micro mirrors tilt in a synchronized manner around a mirror tilting axis when the first post and the second post are positioned in different vertical planes.