# US 11,906,602 B2 · Magnetic sensor and magnetic sensor system

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- Number: US 11,906,602 B2
- Document ID: US11906602B2
- Status: Granted
- Kind: B2
- Application number: 18/112,605
- Filed: 2023-02-22
- Published: 2023-06-29
- Granted: 2024-02-20
- Earliest claimed: 2018-08-24
- Assignees: TDK Corporation
- Applicants: TDK Corporation
- Inventors: Keisuke Uchida
- Web page: https://patentgrep.com/patent/US11906602B2

## CPC

- G01R 33/0011: {comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor}
- G01R 33/0206: {Three-component magnetometers}
- G01R 33/0017: {Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields}
- G01R 33/0076: {Protection, e.g. with housings against stray fields}
- G01R 33/0094: {Sensor arrays}
- G01R 33/09: Magnetoresistive devices
- G01R 33/091: {Constructional adaptation of the sensor to specific applications}
- G03B 3/10: Power-operated focusing
- G03B 2205/0007: Movement of one or more optical elements for control of motion blur
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D)

## Abstract

A magnetic sensor includes a magnetic field converter, a magnetic field detector, and a plurality of shields aligned in a Y direction. The magnetic field converter includes a plurality of yokes. Each yoke has a shape elongated in the Y direction, and is configured to receive an input magnetic field component in a direction parallel to a Z direction and to output an output magnetic field component in a direction parallel to an X direction. The magnetic field detector includes a plurality of trains of elements. Each train of elements includes a plurality of MR elements that are aligned in the Y direction along one yoke and connected in series. Each shield has such a shape that its maximum dimension in the Y direction is smaller than its maximum dimension in the X direction.

## Claims

### Claim 1

A magnetic sensor comprising:
a magnetic field converter;
a magnetic field detector; and
a plurality of shields separated from each other, each of the plurality of shields being formed of a soft magnetic material, wherein
the magnetic field converter is formed of a soft magnetic material, and is configured to receive an input magnetic field for the magnetic sensor and to output an output magnetic field,
the magnetic field detector generates a detection signal dependent on the output magnetic field,
the magnetic field detector includes one or more magnetic detection elements,
each of the one or more magnetic detection elements is configured to receive the output magnetic field and to generate a detection value which varies depending on the output magnetic field,
the detection signal depends on the detection value,
as viewed in a direction parallel to a first direction, the plurality of shields are aligned in a second direction intersecting the first direction and overlap the magnetic field converter and the magnetic field detector, and
as viewed in a direction parallel to the first direction, each of the plurality of shields has such a shape that its maximum dimension in the second direction is smaller than its maximum dimension in a third direction intersecting each of the first direction and the second direction, and as viewed in a direction parallel to the third direction, each of the plurality of shields has such a shape that its maximum dimension in the first direction is smaller than its maximum dimension in the second direction.

### Claim 2 (depends on 1)

The magnetic sensor according to claim 1, wherein, as viewed in a direction parallel to the first direction, the magnetic field converter has a shape elongated in the second direction.

### Claim 3 (depends on 1)

The magnetic sensor according to claim 1, wherein
the magnetic field detector includes a plurality of magnetic detection elements as the one or more magnetic detection elements, and
as viewed in a direction parallel to the first direction, each of the plurality of magnetic detection elements is located inside a perimeter of any one of the plurality of shields.

### Claim 4 (depends on 3)

The magnetic sensor according to claim 3, wherein
as viewed in a direction parallel to the first direction, the magnetic field converter is located inside the perimeter of any one of the plurality of shields.

### Claim 5 (depends on 3)

The magnetic sensor according to claim 3, wherein the plurality of magnetic detection elements constitute one or more trains of elements, each of the one or more trains of elements including two or more of the plurality of magnetic detection elements that are aligned in the second direction along the magnetic field converter and connected in series.

### Claim 6 (depends on 1)

The magnetic sensor according to claim 1, wherein the first, second and third directions are orthogonal to one another.

### Claim 7 (depends on 1)

The magnetic sensor according to claim 1, wherein
each of the one or more magnetic detection elements is a magnetoresistive element,
the magnetoresistive element includes a magnetization pinned layer having a magnetization in a predetermined direction, and a free layer having a magnetization whose direction is variable depending on an applied magnetic field, and
the detection value varies depending on an angle that the direction of the magnetization of the free layer forms with respect to the direction of the magnetization of the magnetization pinned layer.

### Claim 8 (depends on 7)

The magnetic sensor according to claim 7, wherein the direction of the magnetization of the magnetization pinned layer is parallel to the third direction.

### Claim 9 (depends on 1)

A magnetic sensor system comprising:
the magnetic sensor according to claim 1; and
a magnetic field generator for generating a predetermined magnetic field, wherein
the magnetic sensor and the magnetic field generator are configured so that a partial magnetic field is applied to the magnetic sensor, the partial magnetic field being part of the predetermined magnetic field, and
the input magnetic field is the partial magnetic field.

### Claim 10

A magnetic sensor comprising:
a magnetic field converter;
a magnetic field detector; and
a plurality of shields separated from each other, each of the plurality of shields being formed of a soft magnetic material, wherein
the magnetic field converter includes one or more yokes each formed of a magnetic material,
each of the one or more yokes is configured to receive an input magnetic field for the magnetic sensor and to output an output magnetic field,
the magnetic field detector generates a detection signal dependent on the output magnetic field,
the magnetic field detector includes one or more magnetic detection elements,
each of the one or more magnetic detection elements is configured to receive the output magnetic field and to generate a detection value which varies depending on the output magnetic field,
the detection signal depends on the detection value,
as viewed in a direction parallel to a first direction, the plurality of shields are aligned in a second direction intersecting the first direction and overlap the magnetic field converter and the magnetic field detector, and
as viewed in a direction parallel to the first direction, each of the plurality of shields has such a shape that its maximum dimension in the second direction is smaller than its maximum dimension in a third direction intersecting each of the first direction and the second direction, and as viewed in a direction parallel to the third direction, each of the plurality of shields has such a shape that its maximum dimension in the first direction is smaller than its maximum dimension in the second direction.
