# US 11,906,495 B2 · Sensor and method for calibrating sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,906,495 B2 - Document ID: US11906495B2 - Status: Granted - Kind: B2 - Application number: 16/991,146 - Filed: 2020-08-12 - Published: 2021-04-15 - Granted: 2024-02-20 - Earliest claimed: 2019-10-09 - Assignees: Kabushiki Kaisha Toshiba - Applicants: Kabushiki Kaisha Toshiba - Inventors: Yumi Hayashi; Hiroaki Yamazaki - Web page: https://patentgrep.com/patent/US11906495B2 ## CPC - G01N 33/0006: {Calibrating gas analysers} - G01N 33/0027: {concerning the detector} - G01N 33/0073: {Control unit therefor} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract According to one embodiment, a sensor includes a sensor part including a first film, and a structure body including a second film. The first film has a first density, and a first concentration of a first element. The second film has at least one of a second density, or a second concentration of the first element. The second concentration is greater than the first concentration. The second density is greater than the first density. ## Claims ### Claim 1 A sensor, comprising: a sensor part including a first film; a structure body including a second film; a first member including a first surface; and a second member including a second surface facing the first surface, the first film having a first density, the second film having a second density being greater than the first density, the second member including a hole, the structure body being provided at the second surface, the sensor part being provided at the first surface, wherein the sensor part overlaps the hole in a direction from the first member toward the second member, and the structure body does not overlap the hole in the direction. ### Claim 2 (depends on 1) The sensor according to claim 1, wherein at least one of the first member or the second member includes a side portion, and at least a portion of the structure body is between the sensor part and the side portion. ### Claim 3 (depends on 1) The sensor according to claim 1, wherein at least a portion of the sensor part is between a portion of the structure body and an other portion of the structure body. ### Claim 4 (depends on 1) The sensor according to claim 1, comprising: a plurality of the structure bodies, the plurality of structure bodies including a first structure body and a second structure body, at least a portion of the sensor part being between the first structure body and the second structure body. ### Claim 5 (depends on 4) The sensor according to claim 4, wherein the plurality of structure bodies further includes a third structure body and a fourth structure body, and at least a portion of the sensor part is between the third structure body and the fourth structure body in a direction crossing a direction from the first structure body toward the second structure body. ### Claim 6 (depends on 1) The sensor according to claim 1, wherein the first film includes a second element and a third element, the second element includes at least one selected from the group consisting of Pd, Pt, and Au, and the third element includes at least one selected from the group consisting of Si, P, and B. ### Claim 7 (depends on 6) The sensor according to claim 6, wherein the first film further includes a fourth element, and the fourth element includes at least one selected from the group consisting of Cu, Ag, Ni, Fe, and Cr. ### Claim 8 (depends on 1) The sensor according to claim 1, wherein the first film is amorphous and the second film includes a crystal, or the second film has a higher crystallinity than a crystallinity of the first film. ### Claim 9 (depends on 1) The sensor according to claim 1, wherein a sensor signal output from the sensor part changes according to a concentration of the first element included in a gas at a periphery of the sensor part. ### Claim 10 (depends on 1) The sensor according to claim 1, wherein the structure body includes a heater. ### Claim 11 (depends on 10) The sensor according to claim 10, further comprising: a controller, the controller including a heater circuit electrically connected to the heater, the heater circuit being configured to supply a current to the heater, the second film releasing the first element when a current is supplied to the heater. ### Claim 12 (depends on 11) The sensor according to claim 11, wherein the sensor part includes a first electrode and a second electrode, the controller includes a detection circuit electrically connected to the first and second electrodes, the detection circuit is configured to output a detection signal, and the detection signal changes according to a concentration of the first element included in a gas at a periphery of the sensor part. ### Claim 13 (depends on 12) The sensor according to claim 12, wherein a distance between the first electrode and the second electrode changes according to the concentration of the first element included in the gas at the periphery of the sensor part. ### Claim 14 (depends on 12) The sensor according to claim 12, wherein the controller includes a control circuit, and the control circuit causes the detection signal to be output from the detection circuit by calibrating a signal obtained from the first and second electrodes when the first element is released. ### Claim 15 A sensor, comprising: a sensor part including a first film; a structure body including a second film; a first member; and a second member including a hole, the first film having a first density, the second film having a second density being greater than the first density, the sensor part and the structure body being provided between the first member and the second member, a direction from the sensor part to the hole crossing a direction from the sensor part to the structure body, and a distance between the hole and the sensor part being less than a distance between the hole and the structure body.