Method of inspecting surface and surface inspection apparatus
AssigneeHonda Motor Co., Ltd.
InventorSanshiro Sakamoto
Life of this patent
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Abstract
The present invention provides a method of inspecting a surface including detecting a presence or absence of a defect derived from a surface irregularity part of a planar inspection object to be conveyed in a predetermined direction, using a change in intensity of inspection light, the inspection light including at least two inspection lights that are parallel to a surface of the inspection object in a side view of the inspection object and pass over the surface of the inspection object or through the inspection object in a direction intersecting the conveyance direction in a plan view of the inspection object, the two inspection lights being non-parallel to each other in the plan view.
Claims9
A method of inspecting a surface, comprising detecting a presence or absence of a defect derived from a surface irregularity part or an internal gap of a planar inspection object to be conveyed in a predetermined direction, using a change in intensity of inspection light,
- the inspection light including at least two inspection lights that are parallel to a surface of the inspection object in a side view of the inspection object and pass over the surface of the inspection object or through the inspection object in a direction intersecting the conveyance direction in a plan view of the inspection object,
- the two inspection lights being non-parallel to each other in the plan view,
- the method further comprising specifying a position where the defect is present in a plane on the surface of the inspection object from coordinates in the conveyance direction specified by using a timing at which the intensity of the inspection light changes, and coordinates in a direction orthogonal to the conveyance direction specified by using a difference in timings at which the intensity of the two inspection lights changes.
A surface inspection apparatus configured to detect a presence or absence of a defect derived from a surface irregularity part or an internal gap of a planar inspection object to be conveyed in a predetermined direction, using a change in intensity of inspection light, the surface inspection apparatus comprising:
- a conveyor capable of conveying the planar inspection object in the predetermined direction;
- a first light emitter and a second light emitter capable of emitting at least two inspection lights so as to be non-parallel to each other in a plan view, the at least two inspection lights being parallel to a surface of the inspection object in a side view of the inspection object and passing over the surface of the inspection object or through the inspection object in a direction intersecting the conveyance direction in the plan view of the inspection object;
- a light receiver configured to detect a change in intensity of each of the inspection lights;
- and
- a coordinate specifier that specifies a position where the defect is present in a plane on the surface of the inspection object from coordinates in the conveyance direction specified by using a timing at which the intensity of the inspection light changes, and coordinates in a direction orthogonal to the conveyance direction specified by using a difference in timings at which the intensity of the two inspection lights changes.
Dependencies are inferred from the claim text.