# US 11,906,443 B2 · Optical system for imaging enabling high resolution > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,906,443 B2 - Document ID: US11906443B2 - Status: Granted - Kind: B2 - Application number: 18/205,108 - Filed: 2023-06-02 - Published: 2023-11-30 - Granted: 2024-02-20 - Earliest claimed: 2022-04-18 - Assignees: Green Optics Co., Ltd. - Applicants: Green Optics Co., Ltd. - Inventors: Hyun Il Cho; Dong Geun Kim; Kyoung Sang Moon; Jin Ho Kim; Jae Hee Byun - Web page: https://patentgrep.com/patent/US11906443B2 ## CPC - G01N 21/9501: {Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} - G01N 21/95684: {Patterns showing highly reflecting parts, e.g. metallic elements} - G02B 13/00: Optical objectives specially designed for the purposes specified below (with variable magnification {in general} G02B15/00) - G02B 17/08: Catadioptric systems {(used in non-imaging applications G02B19/00)} - G02B 27/00: Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 - G01N 2201/0636: Reflectors - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract Disclosed is an optical system for imaging, which enables high resolution. An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, includes a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations, and a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus. ## Claims ### Claim 1 An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, the optical system comprising: a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations; and a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus, wherein the inspection light and the monitoring light have different wavelength bands within a UV-C wavelength band, a lens that is first disposed within the dioptric group is implemented as a vitreous fluoride material, and a lens configured to reflect light passing through the dioptric group within the reflection dioptric group and to transmit light that is incident thereon after being reflected by a mirror surface of a lens within the reflection dioptric group is implemented as a vitreous fluoride material. ### Claim 2 (depends on 1) The optical system of claim 1, wherein the inspection light comprises light having a wavelength band within a preset error range based on 193 nm. ### Claim 3 (depends on 1) The optical system of claim 1, wherein the monitoring light comprises light having a wavelength band within a preset error range based on 266 nm. ### Claim 4 (depends on 1) The optical system of claim 1, wherein the dioptric group comprises an iris, a plurality of lenses, and a field lens. ### Claim 5 (depends on 4) The optical system of claim 4, wherein the plurality of lenses primarily focuses the inspection light and the monitoring light on a location farther than a location of the field lens in a direction in which the light is incident on the dioptric group. ### Claim 6 (depends on 5) The optical system of claim 5, wherein the plurality of lenses primarily focuses the monitoring light on a location farther than a location of the inspection light. ### Claim 7 (depends on 1) The optical system of claim 1, wherein the reflection dioptric group comprises a plurality of lenses. ### Claim 8 (depends on 7) The optical system of claim 7, wherein a first lens that is initially disposed in a direction in which the light is incident from the dioptric group to the reflection dioptric group, among the plurality of lenses, comprises a mirror surface on an outer surface of the first lens. ### Claim 9 (depends on 8) The optical system of claim 8, wherein the first lens further comprises a hollow within the first lens. ### Claim 10 An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, the optical system comprising: a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations; and a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus, wherein the inspection light and the monitoring light have different wavelength bands within a UV-C wavelength band, each of one lens within the dioptric group and one lens within the reflection dioptric group is implemented as a vitreous fluoride material, the dioptric group comprises some or all of first to fifth lenses, and the reflection dioptric group comprises: an eighth lens has a form in which both ends of the eighth lens are bent toward a point on which light is to be focused; a sixth lens has a form in which both ends of the sixth lens are bent toward the eighth lens, comprises a hollow, and has a mirror surface on one surface thereof; and a seventh lens is disposed in a rear of the sixth lens in a direction in which light is incident, reflects the light that has passed through the dioptric group, and transmits light that is incident thereon after being reflected by the mirror surface of the sixth lens.