MEMS microparticle sensor

An electronic system comprising a plurality of MEMS (microelectromechanical sensor) sensing devices, each MEMS sensing device including:

• a semiconductor substrate integrating a sensor and a pump,
• the sensor including a sensor cavity, a membrane suspended over the sensor cavity, and a piezoelectric element located over the membrane and configured to cause the membrane to oscillate, about an equilibrium position, at a resonance frequency when sensing electric signals are applied to the piezoelectric element during a first operative phase of the MEMS sensing device, said resonance frequency depending on an amount of microparticles located on the membrane;
• the membrane including a plurality of through holes that place the sensor cavity in fluid communication with the environment;
• and
• wherein the pump is configured to cause air pressure in the sensor cavity to be reduced with respect to the air pressure of the environment during the first operative phase such that microparticles are caused to adhere onto the membrane by a suction force through the set of through holes.

A method comprising:

• manufacturing a MEMS (microelectromechanical sensor) sensing device for sensing microparticles in an environment external to the MEMS sensing device, the manufacturing including:
• integrating at least one sensor and at least one pump in a semiconductor body, the integrating comprising:
• forming a sensor cavity in the semiconductor body;
• forming a membrane over the sensor cavity, the membrane including a plurality of through holes;
• and
• forming a piezoelectric element over the membrane.