# US 11,906,385 B2 · Photonic device, method for operating a photonic device and method for manufacturing a photonic device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,906,385 B2 - Document ID: US11906385B2 - Status: Granted - Kind: B2 - Application number: 17/047,637 - Filed: 2019-04-12 - Published: 2021-04-15 - Granted: 2024-02-20 - Earliest claimed: 2018-04-16 - Assignees: ams International AG - Applicants: ams International AG - Inventors: Jens Hofrichter - Web page: https://patentgrep.com/patent/US11906385B2 ## CPC - G01L 9/0076: {using photoelectric means} - G02B 6/1225: {comprising photonic band-gap structures or photonic lattices} - G02B 6/2935: {Mach-Zehnder configuration, i.e. comprising separate splitting and combining means} - G02B 2006/12159: {Interferometer} - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A photonic device includes a semiconductor substrate and a pressure-sensitive membrane. The pressure-sensitive membrane is arranged in or on the substrate. A photonic structure is at least partly coupled to the membrane and arranged to change an optical property depending on a deformation to be induced by a pressure applied to the membrane. ## Claims ### Claim 1 A photonic device comprising: a semiconductor substrate, a pressure-sensitive membrane arranged in or on the substrate, and a photonic structure at least partly coupled to the membrane, wherein an optical property of the photonic structure is changed depending on a deformation to be induced by a pressure applied to the membrane, the optical property of the photonic structure is changed due to tensile strain and compressive strain, the optical property which is changed is an index of refraction of the photonic structure, and the deformation induced by the pressure applied to the membrane results in a change of the index of refraction of the photonic structure. ### Claim 2 (depends on 1) The photonic device according to claim 1, wherein the photonic structure is coupled to a suspended membrane area of the membrane such that a deformation to be induced by a pressure applied to the membrane deforms the photonic structure. ### Claim 3 (depends on 1) The photonic device according to claim 1, wherein the photonic structure comprises at least one optical coupler and at least one waveguide, wherein: the least one optical coupler is arranged to input and/or output light to the at least one waveguide, and the at least one waveguide is configured to have an index of refraction, which changes as a function of deformation to be induced by a pressure applied to the membrane. ### Claim 4 (depends on 3) The photonic device according to claim 3, wherein the at least one optical coupler comprises at least one of a grating coupler for vertical coupling, an edge coupler, an adiabatic coupler. ### Claim 5 (depends on 3) The photonic device according to claim 3, wherein the waveguide comprises at least one of a coherent receiver or an interferometer. ### Claim 6 (depends on 5) The photonic device according to claim 5, wherein the waveguide, implemented as interferometer, comprises a measurement branch and a reference branch, the measurement branch comprises a measurement section which forms a detection arm and at least partly overlaps with the membrane, and the reference branch comprises a reference section which forms a reference arm. ### Claim 7 (depends on 6) The photonic device according to claim 6, wherein the measurement and the reference branches are arranged as a Mach-Zehnder interferometer or cascaded Mach-Zehnder interferometer. ### Claim 8 (depends on 6) The photonic device according to claim 6, wherein the measurement and the reference branches are arranged as a ring resonator or racetrack resonator interferometer. ### Claim 9 (depends on 1) The photonic device according to claim 1, further comprising an optical sensor which is coupled to the photonic structure by means of at least one optical coupler. ### Claim 10 (depends on 1) The photonic device according to claim 1, further comprising a light source which is coupled to the photonic structure by means of at least one optical coupler. ### Claim 11 (depends on 1) An optical microphone comprising at least one photonic device according to of claim 1. ### Claim 12 A method for operating a photonic device, wherein the photonic device comprises a pressure-sensitive membrane arranged in or on a substrate and a photonic structure at least partly coupled to the membrane, the method comprising: applying a pressure to the membrane, detecting a change of an optical property of the photonic structure depending on a deformation induced by the pressure applied to the membrane, wherein the photonic structure is arranged to change the optical property due to tensile strain and compressive strain, and changing the optical property which is an index of refraction of the photonic structure, and wherein the deformation induced by the pressure applied to the membrane results in a change of the index of refraction of the photonic structure. ### Claim 13 (depends on 12) The method according to claim 12, further comprising: emitting light by means of a light source, coupling the emitted light into an input side of the photonic structure by means of an optical coupler, coupling light out at an output side of the photonic structure by means of another optical coupler, and detecting light from the output side by means of an optical sensor. ### Claim 14 (depends on 13) The method according to claim 13, wherein the photonic structure comprises at least one waveguide coupled to the membrane, which is configured to have an index of refraction which changes as a function of deformation induced by the pressure applied to the membrane and wherein the optical sensor detects changes of light intensity depending on the index of refraction of the at least one waveguide. ### Claim 15 A method for manufacturing a photonic device, comprising: providing a semiconductor substrate, arranging a pressure-sensitive membrane in or on the substrate, and coupling a photonic structure at least partly to the membrane, wherein the photonic structure is arranged to change an optical property depending on a deformation to be induced by a pressure applied to the membrane, wherein the photonic structure is arranged to change the optical property due to tensile strain and compressive strain, and wherein the optical property which is changed is an index of refraction of the photonic structure, and the deformation induced by the pressure applied to the membrane results in a change of the index of refraction of the photonic structure. ### Claim 16 (depends on 15) The method according to claim 15, wherein the semiconductor substrate is made from silicon and the photonic structure is made from silicon dioxide, silicon nitride or any combination thereof.