# US 11,906,332 B2 · MOS transistor isolated from the substrate of an integrated circuit and application for detecting an opening of a closed container

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- Number: US 11,906,332 B2
- Document ID: US11906332B2
- Status: Granted
- Kind: B2
- Application number: 17/504,021
- Filed: 2021-10-18
- Published: 2022-04-21
- Granted: 2024-02-20
- Earliest claimed: 2020-10-19
- Assignees: STMicroelectronics (Rousset) SAS
- Applicants: STMicroelectronics (Rousset) SAS
- Inventors: Pascal Fornara
- Web page: https://patentgrep.com/patent/US11906332B2

## CPC

- G01D 5/24: by varying capacitance
- H10D 1/692: {Electrodes}
- H10D 30/0316: {of lateral bottom-gate TFTs comprising only a single gate}
- H10D 30/0321: {comprising silicon, e.g. amorphous silicon or polysilicon}
- H10D 30/6732: {Bottom-gate only TFTs}
- H10D 30/6745: {Polycrystalline or microcrystalline silicon}
- H10D 64/035: {comprising conductor-insulator-conductor-insulator-semiconductor structures}
- H10D 84/811: {Combinations of field-effect devices and one or more diodes, capacitors or resistors}
- H10D 87/00: Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate
- G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

An integrated circuit includes a first substrate. A MOS transistor has a first polysilicon region electrically isolated from the first substrate and including a gate region. A second polysilicon region is electrically isolated from the first polysilicon region and from the first substrate. The second polysilicon region includes a source region, a substrate region and a drain region of the MOS transistor. The first polysilicon region is located between an area of the first substrate and the second polysilicon region.

## Claims

### Claim 1

A system, comprising:
a closed container;
an integrated circuit having a first substrate and first and second terminals;
an electrically conductive wire connecting the first and second terminals and having a severable part that is arranged to be severed in the event of an opening or attempted opening of the closed container; and
a detection device configured to detect a severing of the severable part;
wherein the detection device includes, within the integrated circuit:
a first capacitor electrically isolated from the first substrate of the integrated circuit and connected to the first terminal;
a first MOS transistor having source and drain regions that are electrically isolated from the first substrate, and a gate region connected to the second terminal, wherein said first MOS transistor is configured to be in an on-state in response to a zero voltage applied to the gate region and in an off-state in response to a non-zero voltage applied to the gate region;
a second capacitor electrically isolated from the first substrate of the integrated circuit and having a first electrode connected to the drain region of the first MOS transistor; and
a measuring circuit configured to measure a voltage at said first electrode, wherein the voltage of said first electrode is indicative of a present or past severing of said severable part if said voltage is lower than a threshold.

### Claim 2 (depends on 1)

The system according to claim 1, wherein the first MOS transistor comprises:
a first polysilicon region electrically isolated from the first substrate and including the gate region, a second polysilicon region electrically isolated from the first polysilicon region and from the first substrate, said second polysilicon region including the source region, a substrate region and the drain region of said first MOS transistor, wherein the first polysilicon region is located between an area of the first substrate and the second polysilicon region.

### Claim 3 (depends on 2)

The system according to claim 2, wherein the substrate region of the second polysilicon region for the first MOS transistor is less heavily doped than the first polysilicon region.

### Claim 4 (depends on 2)

The system according to claim 2, wherein the substrate region of the second polysilicon region for the first MOS transistor comprises one of: intrinsic polysilicon or doped polysilicon with a dopant concentration of less than 1017 atoms/cm3.

### Claim 5 (depends on 2)

The system according to claim 2, wherein the first polysilicon region has a dopant concentration of more than 1019 atoms/cm3.

### Claim 6 (depends on 2)

The system according to claim 2, wherein the first MOS transistor is a PMOS transistor.

### Claim 7 (depends on 6)

The system according to claim 6, wherein the source region the first MOS transistor connected to ground and wherein the first MOS transistor has a threshold voltage such that it is in an on state in response to a zero voltage is applied to the gate region and in an off state in in response to a negative bias applied to the gate region.

### Claim 8 (depends on 1)

The system according to claim 1, wherein each of the first capacitor and the second capacitor comprises two polysilicon electrodes separated by a dielectric and resting on an isolating region of the integrated circuit.

### Claim 9 (depends on 1)

The system according to claim 1, further comprising:
a contactless passive transponder configured to communicate with a reader via an antenna by using a carrier signal, the contactless passive transponder including the integrated circuit having two antenna terminals connected to the antenna;
wherein the integrated circuit further includes a comparison circuit configured to compare the voltage of said first electrode with said threshold; and
a processing circuit configured to: command a charging of the first capacitor in response to a first command from the reader; command a charging of the second capacitor in response to a second command from the reader; activate the measuring circuit in response to an activation command from the reader; and communicate a result of said comparison in response to a read command from the reader.

### Claim 10

A method for detecting whether a severable part of an electrically conductive wire connecting first and second terminals of an integrated circuit has been severed in the event of an opening or attempted opening of a closed container, comprising:
charging a first capacitor electrically isolated from a first substrate of the integrated circuit and connected to the first terminal;
charging a second capacitor electrically isolated from the first substrate of the integrated circuit and having a first electrode connected to a drain region of a first MOS transistor; and
using said first MOS transistor to take at least one measurement of a voltage of the first electrode of the second capacitor and compare the measured voltage to a threshold.

### Claim 11 (depends on 10)

The method according to claim 10, wherein charging the first and second capacitors comprises charging only once, wherein using comprises taking a plurality of measurements of the voltage of the first electrode at distant measuring times comparing the plurality of measurements to said threshold, wherein a measured voltage that is below said threshold at one of said distant measuring times is indicative of the severable part having been severed at or before said one of said distant measuring times.

### Claim 12

A system, comprising:
an integrated circuit, including:
a first substrate; and
a first MOS transistor having a first polysilicon region electrically isolated from the first substrate and including a gate region, a second polysilicon region electrically isolated from the first polysilicon region and from the first substrate, said second polysilicon region including a source region, a substrate region and a drain region of said first MOS transistor, wherein the first polysilicon region is located between an area of the first substrate and the second polysilicon region;
wherein the first MOS transistor is a PMOS transistor; and
wherein the source region the first MOS transistor connected to ground and wherein the first MOS transistor has a threshold voltage such that it is in an on state in response to a zero voltage is applied to the gate region and in an off state in in response to a negative bias applied to the gate region.

### Claim 13 (depends on 12)

The system according to claim 12, wherein the substrate region of the second polysilicon region for the first MOS transistor is less heavily doped than the first polysilicon region.

### Claim 14 (depends on 12)

The system according to claim 12, wherein the substrate region of the second polysilicon region for the first MOS transistor comprises one of: intrinsic polysilicon or doped polysilicon with a dopant concentration of less than 1017 atoms/cm3.

### Claim 15 (depends on 12)

The system according to claim 12, wherein the first polysilicon region has a dopant concentration of more than 1019 atoms/cm3.

### Claim 16 (depends on 12)

The system according to claim 12, wherein the integrated circuit further comprises an isolation trench located in the first substrate, and wherein the first polysilicon region is located above the isolation trench.

### Claim 17 (depends on 16)

The system according to claim 16, wherein, in a source-drain direction of the first MOS transistor, the first polysilicon region extends beyond the second polysilicon region and wherein the second polysilicon region rests on the first polysilicon region via a first dielectric region.

### Claim 18 (depends on 16)

The system according to claim 16, wherein:
the first polysilicon region extends beyond the second polysilicon region in a direction perpendicular to a source-drain direction of the first MOS transistor; and
in the source-drain direction of the first MOS transistor, a dimension of the second polysilicon region is greater than a dimension of the first polysilicon region and the second polysilicon region rests on the first polysilicon region and on the isolation trench via a second dielectric region.

### Claim 19 (depends on 16)

The system according to claim 16, wherein:
the first polysilicon region extends beyond the second polysilicon region in a direction perpendicular to a source-drain direction of the first MOS transistor; and
in the source-drain direction of the first MOS transistor, a dimension of the second polysilicon region is greater than a dimension of the first polysilicon region, and the second polysilicon region rests on the first polysilicon region via a third dielectric region, and further rests on the isolation trench.

### Claim 20

A system, comprising:
an integrated circuit, including:
a first substrate; and
a first MOS transistor having a first polysilicon region electrically isolated from the first substrate and including a gate region, a second polysilicon region electrically isolated from the first polysilicon region and from the first substrate, said second polysilicon region including a source region, a substrate region and a drain region of said first MOS transistor, wherein the first polysilicon region is located between an area of the first substrate and the second polysilicon region;
wherein the integrated circuit further comprises:
an isolation trench located in the first substrate; and
a dielectric layer surrounding the first polysilicon region, wherein the first polysilicon region is surrounded by the dielectric layer thereof extending through the isolation trench into the first substrate, and wherein the substrate region of the first MOS transistor rests at least partially on one end of the first polysilicon region surrounded by said dielectric layer and the source and drain regions resting on the isolation trench.

### Claim 21 (depends on 20)

The system according to claim 20, wherein the integrated circuit further comprises at least one non-volatile memory cell of a type having a select transistor with a gate buried in the first substrate, and wherein the first polysilicon region has a shape like that of the gate of said select transistor.

### Claim 22

A system, comprising:
an integrated circuit, including:
a first substrate; and
a first MOS transistor having a first polysilicon region electrically isolated from the first substrate and including a gate region, a second polysilicon region electrically isolated from the first polysilicon region and from the first substrate, said second polysilicon region including a source region, a substrate region and a drain region of said first MOS transistor, wherein the first polysilicon region is located between an area of the first substrate and the second polysilicon region;
wherein the integrated circuit further comprises:
a dielectric layer disposed between the first polysilicon region and the first substrate; and
a second MOS transistor including, in the first substrate, a source region, a drain region and a substrate region between the source and drain regions and covered by said dielectric layer, the first polysilicon region including a gate region common to the first MOS transistor and to the second MOS transistor.

### Claim 23 (depends on 22)

The system according to claim 22, wherein the second MOS transistor is one of an NMOS transistor or a PMOS transistor.
