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US 11,906,087 B2Granted
Flanged joint and method of fluidly connecting two components
AssigneeApplied Materials, Inc.
InventorsLukas Kremser, Andreas Sauer, Stefan Bangert
Life of this patent
Estimating the term…
Abstract
A flanged joint is described. The flanged joint has a first flange member with a first sealing surface and a second flange member with a second sealing surface. The flanged joint further has a hollow-metal gasket between the first flange member and the second flange member, and a spacer between the first flange member and the second flange member. The spacer defines a minimum distance between the first flange member and the second flange member. The flanged joint can be configured to seal a metal-conveying volume.
Claims17
A flanged joint, comprising:
- a first flange member having a first flat sealing surface, the first flat sealing surface extending from a radial inward edge of the first flange member to a radially outermost edge of the first flange member;
- a second flange member having a second flat sealing surface, the second flat sealing surface extending from a radial inward edge of the second flange member to a radially outermost edge of the second flange member;
- a hollow-metal gasket between the first flange member and the second flange member, wherein the hollow metal gasket includes a material that is chemically resistant to an alkali-metal and an inert metal coating;
- and wherein the hollow-metal gasket is a hollow metal O-ring;
- and
- a spacer between the first flat sealing surface of the first flange member and the second flat sealing surface of the second flange member, the spacer defining a minimum distance between the first flange member and the second flange member, wherein:
- the first flange member includes a first plurality of fastener openings, the second flange member includes a second plurality of fastener openings, wherein each fastener opening of the first plurality of fastener openings faces a fastener opening of the second plurality of fastener openings,
- the flange joint comprises a plurality of fasteners for pressing the first flange member and the second flange member towards each other, wherein each fastener is disposed in a fastener opening of the first plurality of fastener openings and in a fastener opening of the second plurality of fastener openings, and
- the plurality of fasteners are in contact with an exterior surface of the spacer.
6 more elements
A method of fluidly connecting a first component to a second component, the method comprising:
- connecting a first flange member having a first flat sealing surface to the first component, the first flat sealing surface extending from a radial inward edge of the first flange member to a radially outermost edge of the first flange member;
- connecting a second flange member having a second flat sealing surface to the second component, the second flat sealing surface extending from a radial inward edge of the second flange member to a radially outermost edge of the second flange member;
- arranging a hollow-metal gasket between the first flange member and the second flange member, wherein the hollow metal gasket includes a material that is chemically resistant to an alkali-metal and an inert metal coating;
- arranging a spacer between the first flat sealing surface of the first flange member and the second flat sealing surface of the second flange member;
- and connecting the first flange member to the second flange member, wherein
- the hollow-metal gasket forms a seal between the first sealing surface and the second sealing surface, and wherein
- the spacer defines a minimum distance between the first flange member and the second flange member, wherein:
- the first flange member includes a first plurality of fastener openings, the second flange member includes a second plurality of fastener openings, wherein each fastener opening of the first plurality of fastener openings faces a fastener opening of the second plurality of fastener openings,
- the flange joint comprises a plurality of fasteners for pressing the first flange member and the second flange member towards each other, wherein each fastener is disposed in a fastener opening of the first plurality of fastener openings and in a fastener opening of the second plurality of fastener openings, and
- the plurality of fasteners are in contact with an exterior surface of the spacer.
7 more elements
Dependencies are inferred from the claim text.