# US 11,905,968 B2 · Vacuum pump, casing, and inlet port flange

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- Number: US 11,905,968 B2
- Document ID: US11905968B2
- Status: Granted
- Kind: B2
- Application number: 17/439,650
- Filed: 2020-03-13
- Published: 2022-06-16
- Granted: 2024-02-20
- Earliest claimed: 2019-03-26
- Assignees: Edwards Japan Limited
- Applicants: Edwards Japan Limited
- Inventors: Nahoko Yoshihara; Yoshiyuki Sakaguchi; Yohei Ogawa
- Web page: https://patentgrep.com/patent/US11905968B2

## CPC

- F04D 19/042: {Turbomolecular vacuum pumps}
- F04D 29/4206: {especially adapted for elastic fluid pumps}
- F04D 19/04: specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D 29/023: {especially adapted for elastic fluid pumps}
- F04D 29/601: {specially adapted for elastic fluid pumps}
- F04D 29/644: {especially adapted for elastic fluid pumps}
- F05D 2300/121: Aluminium
- F05D 2300/171: Steel alloys
- F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02)
- F05D: INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS

## Abstract

To provide a vacuum pump which separates and constructs an inlet port flange and a casing (outer cylinder) as two components to reduce weight while retaining required strength and which is consequently capable of reducing manufacturing cost. In a vacuum pump, an inlet port flange and a casing (outer cylinder) are separated from each other and constructed as different members. The inlet port flange uses stainless steel as a material thereof and the casing (outer cylinder) use aluminum as a material thereof. The components are fastened to each other by bolts and sealed by an O-ring in order to maintain a vacuum property during assembly of the vacuum pump. Accordingly, a weight of the vacuum pump can be reduced while maintaining strength of the inlet port flange.

## Claims

### Claim 1

A vacuum pump, comprising:
an inlet port flange;
a casing which functions as a housing for covering internal members;
an outlet port;
a base portion; and
a rotating portion which is enclosed by and rotatably supported by the casing and the base portion, wherein
the inlet port flange and the casing are formed as separate components, the casing is made of aluminum, and the inlet port flange and the casing are fastened to each other at an inlet port of the casing using a plurality of fastening bolts such that the inlet port flange extends radially outward from an outer periphery of the casing such that respective heads of the fastening bolts are exposed to the inlet port and the pump is configured to be coupled to an apparatus at a portion of the inlet port flange that is radially outward of the outer periphery of the casing;
characterized in that a plurality of bolt holes for receiving the plurality of fastening bolts are provided radially inside of the outer periphery of the casing.

### Claim 2 (depends on 1)

The vacuum pump according to claim 1, wherein the inlet port flange is made of stainless steel.

### Claim 3 (depends on 1)

The vacuum pump according to claim 1, wherein the casing is provided with a projecting portion for performing positioning when fastening the casing to the inlet port flange.

### Claim 4 (depends on 3)

The vacuum pump according to claim 3, wherein the projecting portion or the inlet port flange is provided with a release portion for absorbing fracture energy.

### Claim 5 (depends on 3)

The vacuum pump according to claim 3, wherein the inlet port flange comprises a release portion for absorbing fracture energy between positions on the inlet port flange that come into contact with the projecting portion when fastening the inlet port flange to the casing.