Additive nanomanufacturing system and method
AssigneeAuburn University
InventorsMasoud Mahjouri-Samani, Nima Shamsaei
Life of this patent
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Abstract
A device including a chamber and a nozzle detachably connected to the chamber, the nozzle defining an aperture, a target carousel disposed within the chamber, a first laser configured to generate a first beam directed toward the target carousel to perform in-situ ablation to form a laser plume, a gas flow system configured to supply gas into the chamber, such that the gas interacts with the laser plume and causes condensation and formation of nanoparticles, and a second laser configured to generate a second beam directed through the interior of the chamber, through the aperture of the nozzle, and toward a substrate disposed outside the device, the second laser beam configured to sinter and crystalize on the substrate the nanoparticles exiting the nozzle.
Claims20
A device comprising:
- a chamber defined by a housing including a top plate and a nozzle arranged opposite the top plate, the nozzle including at least one aperture;
- one or more targets disposed within the chamber;
- a first laser configured to generate a first beam directed through the housing and into the chamber toward the one or more targets to perform in-situ ablation to form a plume, the first beam being directed through the housing opposite of the one or more targets;
- a gas flow system configured to supply gas into the chamber and flow through the chamber, such that the gas interacts with the plume and causes the formation of nanoparticles that flow out of the chamber through at least one aperture at atmospheric pressure;
- and
- a second laser arranged above the top plate of the housing and configured to generate a second beam directed through the top plate and into the chamber, through the at least one aperture of the nozzle, and toward a substrate disposed outside the housing at atmospheric pressure, the second laser beam configured to sinter the nanoparticles passing through the aperture on the substrate.
A method comprising:
- directing a first laser toward a target disposed within a chamber to perform in-situ ablation to form a laser plume, the chamber including a nozzle having an aperture;
- supplying gas into the chamber, such that the gas interacts with the laser plume, causing the formation of nanoparticles, and directs a flow of the nanoparticles toward and through the aperture of the nozzle, wherein the gas increases pressure in the chamber to a first pressure, wherein the nanoparticles are jetted through the aperture of the nozzle;
- and
- directing a second laser beam toward a substrate disposed at an outlet of the chamber, the second laser beam configured to sinter on the substrate the nanoparticles exiting the nozzle, wherein the substrate is arranged in an environment outside of the chamber and maintained at a second pressure,
- wherein the second pressure is atmospheric pressure, and
- wherein the first pressure is greater than the second pressure.
A method comprising:
- initiating in-situ ablation of a target to form a plume inside a chamber;
- supplying gas into the chamber, such that the gas interacts with the plume and causes formation of nanoparticles;
- directing the nanoparticles through the interior of the chamber and toward a substrate disposed at an outlet of the chamber and arranged in an environment outside of the chamber and maintained at atmospheric pressure;
- and
- sintering, on the substrate, the nanoparticles exiting the chamber.
Dependencies are inferred from the claim text.