Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device

A method for manufacturing a micro-nano channel structure, comprising:

• providing a base substrate;
• applying a base material on the base substrate;
• performing a treatment on the base material to form a base layer, wherein the base layer comprises a plurality of protrusions;
• and
• forming a channel wall layer on a side of the plurality of the protrusions away from the base substrate, wherein the channel wall layer is provided with a micro-nano channel, a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, and an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate;
• the micro-nano channel is on a side of the protrusions away from the base substrate, and an orthographic projection of the micro-nano channel on a plane perpendicular to a main surface of the base substrate is partly overlapped with or not overlapped with an orthographic projection of the corresponding protrusions on the plane perpendicular to the main surface of the base substrate.