Electromechanical device based on ferroelectric polymers and methods of manufacturing such a device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorMohammed Benwadih
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Abstract
An electromechanical device comprising: first and second electrodes each comprising a metal layer; an active layer comprising at least one ferroelectric polymer and disposed between the first and the second electrode. The first electrode and the second electrode each comprise an interface layer comprising poly(3,4-ethylenedioxythiophene). Each interface layer is interposed between the active layer and the corresponding metal layer. The invention further relates to a method for manufacturing such a device.
Claims15
An electromechanical device comprising:
- first and second electrodes, the first electrode comprising at least a first metal layer and the second electrode comprising at least a second metal layer,
- an active layer comprising at least one ferroelectric polymer, the active layer being disposed between the first and the second electrode in electrical contact with said first and second electrodes,
- wherein the first electrode and the second electrode respectively comprise a first and a second interface layer the first and second interface layer each comprising poly(3,4-ethylenedioxythiophene),
- wherein the first interface layer is interposed between the active layer and the first metal layer separating them from each other, wherein the second interface layer is interposed between the active layer and the second metal layer separating them from each other.
A method for manufacturing an electromechanical device comprising the following steps:
- formation of a first and second electrodes, the first electrode comprising at least a first metal layer and a second electrode comprising at least a second metal layer,
- formation of an active layer comprising a ferroelectric polymer, said active layer being disposed between the first and the second electrode in electrical contact with said first and second electrodes,
- wherein during the formation of the first electrode it is furthermore to form a first and a second interface layer each comprising a poly(3,4-ethylenedioxythiophene) such that the first interface layer is interposed between the active layer and the first metal layer separating them from each other and that the second interface layer is interposed between the active layer and the second metal layer separating them from each other.
Dependencies are inferred from the claim text.