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US 11,903,302 B2Granted
Organic vapor jet printing system
AssigneeUniversal Display Corporation
InventorsKent Khuong Nguyen, Sriram Krishnaswami, Daniel Toet, Jeff Hawthorne, William E. Quinn
Life of this patent
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Abstract
Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.
Claims33
An organic vapor jet printing (OVJP) deposition system comprising:
- a plurality of OVJP print bars, each comprising a plurality of OVJP print heads;
- a float table comprising:
- one or more substrate grippers configured to hold a substrate having a first active surface, and to adjust a position of the substrate on the float table in at least two degrees of motion;
- and
- one or more controls arranged to provide control over the one or more substrate grippers;
- and
- one or more sensors configured to measure an alignment of a substrate on the float table with the plurality of OVJP print bars;
- wherein a height of each of the plurality of OVJP print bars is configured to be adjusted independently of each of the other OVJP print bars of the plurality of OVJP print bars;
- wherein the float table is configured to be moved in a region that extends below the plurality of OVJP print bars;
- and
- wherein the substrate is configured to be moved on the float table independently of movement of the float table below the plurality of OVJP print bars.
8 more elements
An organic vapor jet printing (OVJP) deposition system comprising:
- a plurality of OVJP print bars, each comprising one or more OVJP print heads;
- a float table comprising:
- one or more substrate grippers configured to hold a substrate having a first active surface, and to adjust a position of the substrate on the float table in at least two degrees of motion;
- and
- one or more controls arranged to provide control over the one or more substrate grippers;
- and
- one or more sensors configured to measure an alignment of a substrate on the float table with the plurality of OVJP print bars;
- wherein a height of each of the plurality of OVJP print bars is configured to be adjusted independently of each of the other OVJP print bars of the plurality of OVJP print bars;
- wherein the float table is configured to be moved in a region that extends below the plurality of OVJP print bars;
- and
- wherein the substrate is configured to be moved on the float table independently of movement of the float table below the plurality of OVJP print bars;
- and
- wherein a height of the one or more OVJP print heads on each OVJP print bar of the plurality of OVJP print bars is configured to be adjusted independently of the height of the each OVJP print bar.
10 more elements
Dependencies are inferred from the claim text.