Microphone chip, microphone, and terminal device
AssigneeHuawei Technologies Co., Ltd.
InventorsDongming Fang, Ming Li
Life of this patent
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Abstract
The disclosure provides a microphone chip, a microphone, and a terminal device. The microphone chip includes a substrate and a diaphragm that are disposed oppositely, a reflector located on a side that is of the diaphragm and that is close to the substrate, a grating group located between the substrate and the diaphragm, and an optical emitter and an optical detector that are located between the substrate and the grating group. The grating group includes a plurality of gratings, and distances between at least two gratings in the plurality of gratings and the reflector are different.
Claims15
A microphone chip, wherein the microphone chip comprises:
- a substrate and a diaphragm that are disposed oppositely;
- a reflector located on a side of the diaphragm and that is close to the substrate;
- a grating group located between the substrate and the diaphragm;
- and
- an optical emitter and an optical detector that are located between the substrate and the grating group, wherein
- the grating group comprises a plurality of gratings, and distances between at least two gratings in the plurality of gratings and the reflector are different, wherein a difference g between the distances between the at least two gratings in the plurality of gratings and the reflector satisfies:
- (2n−1)×λ/8−λ/16≤g≤(2n−1)×λ/8+λ/16, wherein λ is a wavelength of light emitted by the optical emitter, and n is an integer greater than 0.
Dependencies are inferred from the claim text.