High-sensitivity piezoelectric microphone

A piezoelectric microphone, comprising:

• a wafer substrate comprising a cavity;
• a plurality of cantilever beams with a piezoelectric deck structure;
• a fixed column;
• a plurality of flexible elastic members;
• and
• a connecting section;
• wherein:
• the plurality of cantilever beams each comprises a fixed end and a free end suspended above the cavity;
• the plurality of cantilever beams is of a structure in which one end is narrow and the other end is wide, and the fixed end is relatively narrow;
• the fixed column is disposed at a center of a bottom surface of the cavity;
• fixed ends of the plurality of cantilever beams are all connected to a top surface of the fixed column;
• a gap is provided between every two adjacent cantilever beams;
• the plurality of flexible elastic members is connected to free ends of two adjacent cantilever beams to enable the cantilever beams to vibrate synchronously;
• and
• the connecting section is disposed in one gap between every two adjacent cantilever beams for leading out an electric signal of the cantilever beams.