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US 11,901,875 B2Granted
Surface acoustic wave sensor assembly
AssigneeApplied Materials, Inc.
InventorChuang-Chia Lin
Life of this patent
Estimating the term…
Abstract
A sensor device that includes an integrated sensor assembly having a surface acoustic wave (SAW) sensor disposed on a piezoelectric substrate. The SAW sensor is adapted to measure an environmental condition of an environment in response to an RF signal. The SAW sensor includes an interdigitated transducer (IDT) formed on a substrate having at least a layer of a piezoelectric material. The SAW sensor includes either one or more SAW reflectors of a second IDT formed on the piezoelectric material. The SAW sensor further includes an RF antenna formed on the piezoelectric material. The SAW sensor and the RF antenna are integrated with one another on the piezoelectric material.
Claims14
A sensor device comprising:
- a first integrated sensor assembly, the first integrated sensor assembly comprising:
- a first surface acoustic wave (SAW) sensor disposed on a substrate comprising at least a layer of a piezoelectric material, wherein the first SAW sensor is adapted to measure an environmental condition of an environment responsive to receiving a first incoming RF signal, the first SAW sensor comprising:
- a first interdigitated transducer (IDT) formed on a first region of the piezoelectric material, the first IDT to generate a first SAW based on the environmental condition, responsive to receiving the first incoming RF signal;
- and
- a second IDT formed on a second region of the piezoelectric material, wherein the second IDT is to receive the first SAW from the first IDT and generate a first oscillating electric potential associated with a first acoustic frequency of the received first SAW,
- a first RF antenna formed on a third region of the piezoelectric material;
- and
- a second RF antenna, coupled to the second IDT, formed on a fourth region of the piezoelectric material;
- wherein the first SAW sensor and the first RF antenna and the second RF antenna are integrated with one another on the piezoelectric material, and wherein:
- the second RF antenna is to receive the first incoming RF signal;
- the second IDT is further to generate a second SAW based on the environmental condition responsive to receiving the first incoming RF signal;
- the first IDT is further to receive the second SAW from the second IDT;
- the first IDT is further to generate a second oscillating electric potential associated with a second acoustic frequency of the received SAW;
- and
- the first RF antenna is further to output an outgoing RF signal in accordance with the second oscillating electric potential.
12 more elements
An integrated sensor device comprising:
- a first surface acoustic wave (SAW) sensor disposed on a substrate comprising at least a layer of a piezoelectric material, wherein the first SAW sensor is adapted to measure an environmental condition of an environment responsive to receiving a first incoming RF signal, the first SAW sensor comprising a first interdigitated transducer (IDT) formed on a first region of the piezoelectric material, the first IDT to generate a first SAW based on the environmental condition, responsive to receiving the first incoming RF signal;
- and
- a second SAW sensor disposed on the piezoelectric material, wherein the second SAW sensor is adapted to measure the environmental condition of the environment responsive to receiving the first incoming RF signal or a second incoming RF signal, the second SAW sensor comprising a second IDT formed on a second region of the piezoelectric material, the second IDT to generate a second SAW based on the environmental condition responsive to receiving the first incoming RF signal or the second incoming RF signal, wherein the second IDT is further to receive the first SAW from the first IDT and generate a first oscillating electric potential associated with a first acoustic frequency of the received first SAW, and wherein the second IDT is coupled to an RF antenna which is to output a first outgoing RF signal in accordance with the first oscillating electric potential;
- and wherein the first SAW sensor is adapted to operate in a first frequency range and the second SAW sensor is adapted to operate in a second frequency range that is different than the first frequency range, wherein the first SAW sensor is disposed on a first surface of the substrate and the second SAW sensor is disposed on a second surface of the substrate.
1 more element
Dependencies are inferred from the claim text.