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US 11,901,703 B2Granted
QCL with branch structure and related methods
AssigneeUniversity of Central Florida Research Foundation, Inc.
InventorArkadiy Lyakh
Life of this patent
Estimating the term…
Abstract
A QCL may include a substrate, and a semiconductor layer adjacent the substrate. The semiconductor layer may define branch active regions, and a stem region coupled to output ends of the branch active regions. Each branch active region may have a number of stages less than 30.
Claims20
A quantum cascade laser (QCL) comprising:
- a substrate;
- and
- a semiconductor layer adjacent the substrate and defining
- a plurality of branch active regions, and
- a stem region coupled to output ends of the plurality of branch active regions;
- each branch active region comprising
- a plurality of laser cores, and
- a plurality of spacer layers respectively interweaved between the plurality of laser cores,
- a dielectric layer over the plurality of laser cores, and the plurality of spacer layers, the plurality of spacer layers extending laterally to the dielectric layer,
- the plurality of laser cores having a number of stages less than 50.
7 more elements
A tree array quantum cascade laser (QCL) laser device comprising:
- a substrate comprising a back facet, and a front facet opposite the back facet;
- and
- a semiconductor layer adjacent the substrate and defining
- a plurality of branch active regions, and
- a stem region adjacent the back facet and coupled to output ends of the plurality of branch active regions;
- each branch active region comprising
- a plurality of laser cores, and
- a plurality of spacer layers respectively interweaved between the plurality of laser cores,
- a dielectric layer over the plurality of laser cores, and the plurality of spacer layers, the plurality of spacer layers extending laterally to the dielectric layer,
- the plurality of laser cores having a number of stages less than 50;
- each branch active region having a ridge width greater than 10 μm.
8 more elements
A method for making a quantum cascade laser (QCL) comprising:
- forming a semiconductor layer adjacent a substrate and defining
- a plurality of branch active regions, and
- a stem region coupled to output ends of the plurality of branch active regions;
- each branch active region comprising
- a plurality of laser cores, and
- a plurality of spacer layers respectively interweaved between the plurality of laser cores,
- a dielectric layer over the plurality of laser cores, and the plurality of spacer layers, the plurality of spacer layers extending laterally to the dielectric layer,
- the plurality of laser cores having a number of stages less than 50.
5 more elements
Dependencies are inferred from the claim text.