Solar cell, multi-junction solar cell, and method of manufacturing solar cell
AssigneePanasonic Holdings Corporation
InventorsDaiki Watanabe, Hirotaka Katayama
Life of this patent
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Abstract
A solar cell includes: an n-type first amorphous silicon layer provided on a first main surface of a crystalline silicon substrate; an amorphous silicon oxide layer provided on a first main surface of the first amorphous silicon layer; and an n-type fine crystal silicon layer provided on a first main surface of the amorphous silicon oxide layer. An oxygen atom concentration in the first amorphous silicon layer, the amorphous silicon oxide layer, and the fine crystal silicon layer has a maximum value in the amorphous silicon oxide layer with a thickness direction.
Claims10
A solar cell, comprising:
- a first amorphous silicon layer of a first conductivity type provided on a first main surface of a crystalline silicon substrate;
- an amorphous silicon oxide layer provided on a first main surface of the first amorphous silicon layer;
- and
- a microcrystalline silicon layer of the first conductivity type provided on a first main surface of the amorphous silicon oxide layer, wherein
- a concentration of oxygen atoms in the first amorphous silicon layer, the amorphous silicon oxide layer, and the microcrystalline silicon layer has a maximum value in the amorphous silicon oxide layer with a thickness direction, and
- the solar cell further comprises a first passivation layer constituted with an amorphous silicon material between the first main surface of the crystalline silicon substrate and a second main surface of the first amorphous silicon layer.
Dependencies are inferred from the claim text.