Optical sensor
AssigneeJapan Display Inc.
InventorMasashi Tsubuku
Life of this patent
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Abstract
The optical sensor includes a substrate, a first transistor for functioning as a light-receiving element and a second transistor for writing/reading in a pixel region provided on the substrate. The first transistor is formed by a transistor using polycrystalline silicon, the second transistor is formed by a transistor using an oxide semiconductor. A light-shielding layer is provided on the back side of the oxide semiconductor of the second transistor. Thus, it is possible to irradiate light to the optical sensor fora long time, and in addition to increasing the amount of light received by the first transistor, it is possible to suppress variations in the characteristics of the second transistor.
Claims9
An optical sensor comprising:
- a substrate;
- and
- a first transistor, a second transistor, and a first light-shielding layer in a pixel area on the substrate,
- the first transistor including:
- a first polycrystalline silicon layer on the substrate;
- a first insulating film on the first polycrystalline silicon layer;
- a first gate electrode having a region overlapping the first polycrystalline silicon layer on the first insulating film;
- a second insulating film and a third insulating film on the first gate electrode;
- and
- a first source electrode and a first drain electrode electrically connected to the first polycrystalline silicon layer through openings in the second insulating film and the third insulating film,
- the second transistor including:
- an oxide semiconductor layer on the second insulating film;
- the third insulating film on the oxide semiconductor layer;
- a second gate electrode on the third insulating film;
- a fourth insulating film on the second gate electrode;
- and
- a second source electrode and a second drain electrode electrically connected to the oxide semiconductor layer through openings in the fourth insulating film,
- wherein
- the first light-shielding layer is provided between the first insulating film and the second insulating film and has a region overlapping the oxide semiconductor layer, and
- one of the first source electrode and the first drain electrode is electrically connected to the one of the second source electrode and the second drain electrode.
Dependencies are inferred from the claim text.