Semiconductor device and method of manufacturing semiconductor device
AssigneeSony Semiconductor Solutions Corporation
InventorMasaki Haneda
Life of this patent
Estimating the term…
Loading patent…
AssigneeSony Semiconductor Solutions Corporation
InventorMasaki Haneda
Estimating the term…
There is provided a semiconductor device in which the inter-wiring capacitance of wiring lines provided in any layout is further reduced. A semiconductor device that includes a first inter-wiring insulating layer that is provided on a substrate and includes a recess on a side opposite to the substrate, a first wiring layer that is provided inside the recess in the first inter-wiring insulating layer, a sealing film that is provided along an uneven shape of the first wiring layer and the first inter-wiring insulating layer, a second inter-wiring insulating layer that is provided on the first inter-wiring insulating layer to cover the recess, and a gap that is provided between the second inter-wiring insulating layer and the first wiring layer and the first inter-wiring insulating layer. The second inter-wiring insulating layer has a planarized surface that is opposed to the recess.
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.