Resistance measuring structures of stacked devices
AssigneeSamsung Electronics Co., Ltd.
InventorsByounghak Hong, Seunghyun Song, Myunggil Kang, Kang-Ill Seo
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AssigneeSamsung Electronics Co., Ltd.
InventorsByounghak Hong, Seunghyun Song, Myunggil Kang, Kang-Ill Seo
Estimating the term…
Resistance measuring structures for a stacked integrated circuit device are provided. The resistance measuring structures may include a first Complementary Field Effect Transistor (CFET) stack, a second CFET stack, and a conductive connection. The first CFET may include a first upper transistor that includes a first upper drain region and a first lower transistor that is between the substrate and the first upper transistor and includes a first lower drain region. The second CFET may include a second upper transistor that includes a second upper drain region and a second lower transistor that is between the substrate and the second upper transistor and includes a second lower drain region. The conductive connection may electrically connect the first upper drain region and the second upper drain region.
A resistance measuring structure comprising:
A resistance measuring structure comprising:
A resistance measuring structure comprising:
Dependencies are inferred from the claim text.