Wire bonding method and wire bonding apparatus

A wire bonding apparatus for bonding a first end of a wire to a first bonding surface and bonding a second end of the wire to a second bonding surface, comprising:

• a capillary having a through hole through which the wire is inserted;
• an X movement mechanism for moving the capillary relative in an X direction to the first bonding surface or the second bonding surface;
• a Y movement mechanism for moving the capillary relative in a Y direction to the first bonding surface or the second bonding surface;
• a Z movement mechanism for moving the capillary relative in a Z direction to the first bonding surface or the second bonding surface;
• a stage for holding a workpiece having the first bonding surface and the second bonding surface;
• a rotation mechanism for rotating the stage;
• and
• a control unit for controlling the capillary, the X movement mechanism, the Y movement mechanism, the Z movement mechanism, and the rotation mechanism, wherein
• the control unit controls the capillary, the X movement mechanism, the Y movement mechanism, the Z movement mechanism, and the rotation mechanism to perform the following operations:
• bonding the first end of the wire fed from a distal end of the capillary to the first bonding surface;
• moving the capillary in the Z direction while feeding the wire from the distal end of the capillary;
• moving the capillary in a direction including at least one of the X direction and the Y direction while feeding the wire from the distal end of the capillary;
• moving the capillary in a direction including at least one of the X direction, the Y direction, and the Z direction a plurality of times while feeding the wire from the distal end of the capillary;
• moving the capillary to a highest position;
• moving the capillary to the second bonding surface to bond the second end of the wire to the second bonding surface;
• and
• rotating the stage by the rotation mechanism, at any timing between the moving of the capillary in the Z direction and the moving of the capillary in the direction including the at least one of the X direction, the Y direction, and the Z direction, to move the second bonding surface to a position capable of bonding,
• an angle formed by the first bonding surface and the second bonding surface on a side where the wire is stretched is 200° or more, and
• the control unit controls the capillary, the X movement mechanism, the Y movement mechanism, the Z movement mechanism, and the rotation mechanism to perform the moving of the capillary to the highest position after the rotating of the stage.