Semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChung-Yu Lu, Yao-Jen Chang, Sao-Ling Chiu
Life of this patent
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Abstract
Semiconductor structures are provided. A semiconductor structure includes a plurality of product regions over a semiconductor substrate, a plurality of alignment regions over the semiconductor substrate, and a plurality of first features formed in a material layer over the semiconductor substrate. Each of the alignment regions is surrounded by four of the product regions of a group, and each of the first features extends across two adjacent product regions in the group. The product regions are disposed in rows and columns of a first array, and the alignment regions are disposed in rows and columns of a second array, and the first and second arrays have a same center point.
Claims20
A semiconductor structure, comprising:
- a plurality of product regions over a semiconductor substrate;
- an alignment region over the semiconductor substrate and surrounded by the product regions;
- a plurality of first features formed in a material layer over the semiconductor substrate;
- and
- a plurality of second features formed in the material layer over the semiconductor substrate,
- wherein the alignment regions is surrounded by and in physical contact with four of the product regions of a group, and each of the product regions in the group is adjacent to and in physical contact with two other product regions,
- wherein each of the first features extends across two adjacent product regions, and each of the second features is disposed within one of the product regions, and wherein the first features are spaced apart from the second features,
- wherein the alignment region is free of the first and second features.
A semiconductor structure, comprising:
- a plurality of product regions over a semiconductor substrate;
- a plurality of alignment regions over the semiconductor substrate;
- a plurality of first features formed in a material layer over the semiconductor substrate;
- and
- a plurality of second features formed in the material layer and within the product regions,
- wherein each of the alignment regions is surrounded by and in physical contact with four of the product regions of a group, each of the product regions in the group is adjacent to and in physical contact with two other product regions,
- wherein each of the first features extends across two adjacent product regions in the group, and each of the second features is disposed within one of the product regions, and wherein the first features are spaced apart from the second features,
- wherein the product regions are disposed in rows and columns of a first array, and the alignment regions are disposed in rows and columns of a second array, and the first and second arrays have a same center point.
A semiconductor structure, comprising:
- a semiconductor substrate;
- a plurality of die areas on the semiconductor substrate, wherein the die areas are separated from each other by a plurality of scribe lines;
- a plurality of first features in a first product region of each of the die areas and in a material layer;
- a plurality of second features in a second product region of each of the die areas and in the material layer;
- a plurality of third features in a third product region of each of the die areas and in the material layer;
- a plurality of fourth features in a fourth product region of each of the die areas and in the material layer;
- a plurality of fifth features in an alignment region surrounded by the first, second, third and fourth product regions of each of the die areas and in the material layer;
- and
- a plurality of sixth features in each of the die areas and in the material layer, and the sixth features extend across two adjacent product regions of the first, second, third, and fourth product regions of each of the die areas,
- wherein the sixth features are spaced apart from the first, second, third, and fourth features,
- wherein the first product region is adjacent to and in physical contact with the second product region and the third product region, and the fourth product region is adjacent to and in physical contact with the second product region and the third product region,
- wherein the alignment region is free of the first, second, third, and fourth features.
Dependencies are inferred from the claim text.