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US 11,901,304 B2Granted
Integrated circuit structure with fluorescent material, and related methods
AssigneeGlobalFoundries U.S. Inc.
InventorsSunil K. Singh, Vibhor Jain, Siva P. Adusumilli, Sebastian T. Ventrone, Johnatan A. Kantarovsky, Yves T. Ngu
Life of this patent
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Abstract
The disclosure provides an integrated circuit (IC) structure with fluorescent materials, and related methods. An IC structure according to the disclosure may include a layer of fluorescent material on an IC component. The layer of fluorescent material defines a portion of an identification marker for the IC structure.
Claims19
An integrated circuit (IC) structure, comprising:
- a layer of fluorescent material on an exterior surface of a via structure, wherein the layer of fluorescent material defines a portion of an identification marker for the IC structure,
- wherein the layer of fluorescent material is between the exterior surface of the via structure and an insulator liner.
A method of verifying an integrated circuit (IC) structure, the method comprising:
- detecting a layer of fluorescent material on an IC component, wherein the detected layer of fluorescent material defines a portion of an identification marker for the IC structure;
- detecting the absence of fluorescent material on an adjacent IC component, wherein the detected layer of fluorescent material and the adjacent IC component define another portion of the identification marker for the IC structure;
- and
- comparing the identification marker with a verification map for the IC structure to verify the IC structure, wherein the verification map indicates at least one of the location of the fluorescent material and an identifying characteristic of the IC component, the verification map further including a representation of an area of the IC structure, wherein the verification map includes a subset of a plurality of IC components having the fluorescent material.
1 more element
An integrated circuit (IC) structure, comprising:
- an IC component on a substrate, wherein the substrate includes a backside surface having a first trench and a second trench therein;
- a layer of fluorescent material within the first trench within the backside surface of the substrate, wherein the layer of fluorescent material defines a portion of an identification marker for the IC structure;
- and
- a non-fluorescent material within the second trench within the backside surface of the substrate.
1 more element
Dependencies are inferred from the claim text.