Multi-fin vertical field effect transistor and single-fin vertical field effect transistor on a single integrated circuit chip

A vertical field-effect transistor (VFET) device comprising:

• a substrate;
• at least one single-fin VFET formed on the substrate, and each of the at least one single-fin VFET comprising a fin structure and a gate structure surrounding the fin structure, the fin structure forming a channel for current flow in a vertical direction;
• a plurality of multi-fin VFETs formed on the same substrate, each of the plurality of multi-fin VFETs comprising a plurality of fin structures and a connected gate structure surrounding the fin structures;
• and
• a 1st isolation structure between a single-fin VFET and a neighboring multi-fin VFET to electrically disconnect the gate structure of the single-fin VFET and the connected gate structure of the neighboring multi-fin VFET,
• wherein the connected gate structure is formed in a space between the neighboring two fin structures among the plurality of fin structures
• wherein a 2nd isolation structure is formed between two neighboring multi-fin VFETs to electrically disconnect the connected gate structures of the two neighboring multi-fin VFETs from each other,
• wherein the fin structure of the at least one single-fin VFET, the plurality of fin structures of each of the multi-fin VFETs, and the 1stand 2ndisolation structures are extended in directions parallel to each other and a top surface of the substrate, perpendicular to a direction in which the plurality of fin structures are arranged.