Membrane diffuser for a substrate container
AssigneeEntegris, Inc.
InventorsMark V. Smith, Nicholas Thelen, Matthew A. Fuller, Michael C. Zabka, Sung In Moon, John P. Puglia
Life of this patent
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Abstract
Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.
Claims9
A purge diffuser for use in a system for transporting substrates comprising:
- i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports, one or more diverters and an outer surface;
- ii) filter media secured to the outer surface of the purge diffuser core;
- and
- iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates;
- wherein the one or more diverters project into the internal purge gas channel from an inner surface of the purge diffuser core bordering the internal purge gas channel;
- wherein the one or more diverters bridge across the internal purge gas channel from a first location on the inner surface of the puree diffuser core to a second location on the inner surface of the purge diffuser core, the second location being separated from the first location;
- and
- wherein the purge diffuser core, the filter media and the purge port are arranged such that there is a continuous path for purge gas entering through the purge port connector to enter the internal purge gas channel, exit the internal purge gas channel through the diffuser ports, and pass through the filter media.
Dependencies are inferred from the claim text.