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US 11,901,165 B2Granted
Processing chamber with optical fiber with bragg grating sensors
OwnerWilliam J. O'Banion, An-Dien Nguyen +1inventors
InventorsWilliam J. O'Banion, An-Dien Nguyen, Huy D. Nguyen
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Abstract
An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
Claims5
An apparatus for a processing chamber, comprising:
- a thermal controller;
- a light source-based detection system coupled to the thermal controller for communication therewith;
- a heater power source coupled to the thermal controller for communication therewith;
- at least one optical fiber with Fiber Bragg Grating sensors coupled to the light source-based detection system and to at least one gas line located external to the processing chamber;
- at least a portion of the Fiber Bragg Grating sensors of the at least one optical fiber configured to provide temperature-related information associated with the at least one gas line to the light source-based detection system;
- and
- the light source-based detection system configured to convert the temperature-related information into temperature data.
4 more elements
Dependencies are inferred from the claim text.