RF generator device and substrate processing apparatus

A radio frequency (RF) generator device comprising:

• a first RF generator device connected to a first antenna and a second antenna disposed in a chamber,
• wherein the first RF generator device includes:
• a first RF generator configured to supply RF power having a first frequency to the first antenna;
• a second RF generator configured to supply RF power having a second frequency to the second antenna;
• a first RF controller configured to control the first RF generator;
• and
• a second RF controller configured to control the second RF generator,
• wherein the first RF controller includes:
• a first fast Fourier transformer;
• and
• a first filter,
• wherein the second RF controller includes:
• a second fast Fourier transformer;
• and a second filter, wherein the first and the second fast Fourier transformers perform fast Fourier transform on a signal introduced as a reflected wave to decompose the signal into frequency components, and
• the first filter and the second filter remove waves having frequency components that are not outputted from the corresponding RF generator between the first RF generator and the second RF generator.