Method of aligning a charged particle beam apparatus

Method of training an alignment algorithm for aligning a charged particle beam apparatus, comprising the steps of:

• providing an alignment algorithm to be trained, wherein said alignment algorithm comprises at least one neural network;
• providing data related to an alignment transition of said charged particle beam apparatus, wherein said alignment transition extends from a first alignment state towards a second alignment state, wherein the first alignment state and the second alignment state describe multiple operating parameters of multiple components of the charged particle beam apparatus, including multiple lenses;
• and
• providing said data to a modification algorithm for modifying said alignment algorithm.

Charged particle beam apparatus, comprising:

• a charged particle emitter configured to emit a charged particle beam;
• a specimen holder configured to hold a specimen;
• wherein the charged particle beam apparatus is configured to operate in a plurality of alignment states;
• one or more processors;
• and
• a memory, wherein the memory stores non-transitory computer readable instructions that, when executed on the one or more processors, cause the system to:
• cause the charged particle beam apparatus to operate in a first alignment state;
• use an alignment algorithm to effect an alignment transition of the charged particle beam apparatus from said first alignment state towards a second alignment state of said charged particle beam apparatus, wherein the first alignment state and the second alignment state describe multiple operating parameters of multiple components of the charged particle beam apparatus, including multiple lenses, and wherein said alignment algorithm comprises at least one neural network;
• and
• provide data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.

A computer readable medium storing non-transitory computer readable instructions that, when executed on one or more processors, cause the one or more processors to cause a charged particle microscope system to:

• cause a charged particle beam apparatus to operate in a first alignment state;
• use an alignment algorithm to effect an alignment transition of the charged particle beam apparatus from said first alignment state towards a second alignment state of said charged particle beam apparatus, wherein the first alignment state and the second alignment state describe multiple operating parameters of multiple components of the charged particle beam apparatus, including multiple lenses, and wherein said alignment algorithm comprises at least one neural network;
• and
• provide data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.