Sensor assembly for a resistance temperature sensor element and resistance temperature sensor element
AssigneeTE Connectivity Sensors Germany GmbH
InventorsStefan Andreas Roessinger, Horst Sirtl
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Abstract
A sensor assembly for a resistance temperature sensor element includes a substrate and a measuring structure disposed on the substrate. The substrate includes a first material and a stabilized second material. The first material is at least one of aluminum oxide, spinel (magnesium aluminate) and yttrium-aluminum-garnet. The stabilized second material is at least one of stabilized zirconium dioxide and stabilized hafnium dioxide. The stabilized second material is stabilized by containing an oxide of an element having a valence different from four. A coefficient of thermal expansion of the substrate deviates by less than 5% from a coefficient of thermal expansion of the measuring structure.
Claims19
A sensor assembly for a resistance temperature sensor element, comprising:
- a substrate including a first material and a stabilized second material, the first material is at least yttrium-aluminum-garnet, the stabilized second material is at least one of stabilized zirconium dioxide and stabilized hafnium dioxide, the stabilized second material is stabilized by containing an oxide of at least cerium, and having a valence different from four;
- and
- a measuring structure disposed on the substrate, a coefficient of thermal expansion of the substrate deviates by less than 5% from a coefficient of thermal expansion of the measuring structure.
A sensor assembly for a resistance temperature sensor element, comprising:
- a substrate including a first material and a stabilized second material, the first material is at least one of spinel and yttrium-aluminum-garnet, the stabilized second material includes stabilized hafnium dioxide, the stabilized second material is stabilized by containing an oxide of an element having a valence different from four;
- a measuring structure disposed on the substrate, a coefficient of thermal expansion of the substrate deviates by less than 5% from a coefficient of thermal expansion of the measuring structure;
- and
- an insulating layer containing spinel arranged between the measuring structure and the substrate.
A sensor assembly for a resistance temperature sensor element, comprising:
- a substrate including a grain structure having a mixture of grains of a first material and grains of a stabilized second material formed as a single layer, the first material is at least yttrium-aluminum-garnet, the stabilized second material is at least one of stabilized zirconium dioxide and stabilized hafnium dioxide, the stabilized second material is stabilized by containing an oxide of at least one of:
- yttrium, cerium, niobium, and tantalum having a valence different from four;
- and
- a measuring structure disposed on the substrate, a coefficient of thermal expansion of the substrate deviates by less than 5% from a coefficient of thermal expansion of the measuring structure.
Dependencies are inferred from the claim text.