Hot spot defect detecting method and hot spot defect detecting system

A system for detecting hot spot defects, comprising:

• a connecting device, configured to connect an inspection tool;
• a storage medium, configured to store images acquired by the connecting device;
• a processor, coupled to the connecting device and the storage medium, and configured to execute instructions to perform steps of:
• acquiring a plurality of defect images obtained by an inspection tool performing hot scans on a wafer manufactured with the design during runtime and aligning a hot spot map comprising a plurality of hot spot groups extracted from a design of the wafer to each of the defect images to locate the hot spot groups in each defect image;
• for each of the defect images, dynamically mapping each of the hot spot groups located in the respective defect image to one of a plurality of threshold regions;
• and
• for each of the threshold regions, determining at least a detection threshold based on noise levels of the pixels of each hot spot group in the respective threshold region, and determining the pixels having the pixel values deviating from the detection threshold as the hot spot defect.

A method for detecting hot spot defects, adapted to an electronic apparatus, the method comprising:

• acquiring a plurality of defect images obtained by an inspection tool performing hot scans on a wafer manufactured with a design, and training a machine learning model for classifying the defects from the nuisances with the defect images to evaluate optimal filters for detecting the hot spot defects;
• and
• acquiring a plurality of defect images obtained by the inspection tool performing hot scans on the wafer in runtime and aligning a hot spot map comprising a plurality of hot spot groups extracted from the design to each of the defect images to locate the hot spot groups in each defect image;
• for each of the defect images, dynamically mapping each of the hot spot groups located in the respective defect image to one of a plurality of threshold regions;
• and
• for each of the threshold regions, applying the optimal filters to the pixel values of the hot spots of each hot spot group, and determining at least a detection threshold based on noise levels of the pixels of each hot spot group in the respective threshold region, and determining the pixels having the pixel values deviating from the detection threshold as the hot spot defect.