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US 11,899,372 B2Granted
Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
AssigneeNikon Corporation
InventorsYasushi Mizuno, Masaki Kato
Life of this patent
Estimating the term…
Abstract
An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.
Claims19
An exposure device configured to expose a substrate, the exposure device comprising:
- a first light source;
- a plurality of spatial light modulators each of which is configured to spatially modulate an incident beam based on pattern data;
- and
- an optical path switching machine configured to switch an optical path of light from the first light source so as to sequentially guide the light to the plurality of spatial light modulators,
- wherein the optical path switching machine comprises:
- a first switching machine configured to switch the optical path to one of a first optical path and a second optical path;
- and
- a second switching machine (i) that is configured to guide the light guided to the first optical path by the first switching machine to spatial light modulators of a first group among the plurality of spatial light modulators and (ii) that is configured to guide the light guided to the second optical path by the first switching machine to spatial light modulators of a second group among the plurality of spatial light modulators.
5 more elements
An exposure device configured to expose a substrate while moving the substrate in a first direction, the exposure device comprising:
- a first light source;
- a first spatial light modulator and a second spatial light modulator that are arranged in a second direction crossing the first direction and into which light from the first light source enters;
- a data transmission unit configured to transmit first pattern data to the first spatial light modulator and second pattern data to the second spatial light modulator;
- a first projection optical system configured to project an image formed on the first spatial light modulator based on the first pattern data to the substrate;
- a second projection optical system configured to project an image formed on the second spatial light modulator based on the second pattern data to the substrate;
- and
- an optical path switching machine configured to switch an optical path of the light from the first light source so as to sequentially guide the light to the first spatial light modulator and the second spatial light modulator,
- wherein the data transmission unit is configured (i) to divide device pattern data into the first pattern data and the second pattern data and (ii) relatively shift positions of the first pattern data and the second pattern data related to the first direction.
5 more elements
Dependencies are inferred from the claim text.