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US 11,899,363 B2Granted
Salt, acid generator, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
A salt represented by formula (I), an acid generator and a resist composition: wherein R1, R2 and R3 each represent a hydroxy group, —O—R10, —O—CO—O—R10, —O-L1-CO—O—R10; R4, R5, R6, R7, R8 and R9 each represent a halogen atom, a hydroxy group, etc.; L1 represents an alkanediyl group; R10 represents an acid-labile group; X1, X2 and X3 each represent an oxygen atom or a sulfur atom; m1 and m7 represent an integer of 0 to 5, m2 to m6 and m8, m9 represent an integer of 0 to 4, in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4, and at least one of m1, m2 and m3 represents an integer of 1 or more; X4 represents a single bond, —CH2—, —O—, —S—, etc.; and AI− represents an organic anion.
Claims18
A salt represented by formula (I):
- wherein, in formula (I),
- R1, R2 and R3 each independently represent —O—R10, —O—CO—O—R10, —O—L1—CO—O—R10, R4, R5, R6, R7, R8 and R9each independently represent a halogen atom, a hydroxy group, an alkyl fluoride group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- L1 represents an alkanediyl group having 1 to 6 carbon atoms,
- R10 represents an acid-labile group,
- X1, X2 and X3 each independently represent an oxygen atom or a sulfur atom,
- m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
- m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
- m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the same or different from each other,
- m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
- m8 represents an integer of 0 to 4, and when m8 is 2 or more, a plurality of R8 may be the same or different from each other,
- m9 represents an integer of 0 to 4, and when m9 is 2 or more, a plurality of R9 may be the same or different from each other,
- in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4, and at least one of m1, m2 and m3 represents an integer of 1 or more,
- X4 represents a single bond, —CH2—, —O—, —S—, —CO—, —SO— or —SO2—,
- AI represents an organic anion,
- wherein the acid-labile group as for R10 is a group represented by formula (1a) or a group represented by formula (2a):
- wherein, in formula (1a), Raa1, Raa2, and Raa3 each independently represent an alkyl group having 1 to 8 carbon atoms which may have a substituent, an alkenyl group having 2 to 8 carbon atoms which may have a substituent, an alicyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent, or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, or Raa1 and Raa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with carbon atoms to which Raa1 and Raa2 are bonded, and
- represents a bond;
- wherein, in formula (2a), Raa1 and Raa2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, Raa3 represents a hydrocarbon group having 1 to 20 carbon atoms, or Raa2 and Raa3 are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with —C—Xa— to which Raa2 and Raa3 are bonded, and —CH2— included in the hydrocarbon group and the heterocyclic group may be replaced by —O— or —S—,
- Xa represents an oxygen atom or a sulfur atom, and
- represents a bond.
20 more elements
A salt represented by formula (I):
- wherein in formula (I),
- R1, R2 and R3 each independently represent a hydroxy group, —O—R10,—O—CO—O—R10, —O—L1—C—CO—O—R10,
- R4, R5, R6, R7, R8 and R9 each independently represent a halogen atom, a hydroxy group, an alkyl fluoride group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- L1 represents an alkanediyl group having 1 to 6 carbon atoms,
- R10 represents an acid-labile group,
- X1, X2 and X3 each independently represent an oxygen atom or a sulfur atom,
- m1 is 1 and more,
- m2 is 1 and more,
- m3 is 1 and more
- m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
- m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
- m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the same or different from each other,
- m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
- m8 represents an integer of 0 to 4, and when m8 is 2 or more, a plurality of R8 may be the same or different from each other,
- m9 represents an integer of 0 to 4, and when m9 is 2 or more, a plurality of R9 may be the same or different from each other,
- in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4, and at least one of m1, m2 and m3 represents an integer of 1 or more,
- X4 represents a single bond, —CH2—, —O—, —S—, —CO—, —SO— or —SO2—, and
- AI represents an organic anion.
15 more elements
Dependencies are inferred from the claim text.