Magnetic sensor and its manufacturing method
AssigneeTDK Corporation
InventorMakoto Kameno
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AssigneeTDK Corporation
InventorMakoto Kameno
Estimating the term…
An object of the present invention is to provide a magnetic sensor capable of, while suppressing an increase in manufacturing cost, controlling the gap size so as to make the gap between the element formation surface of the sensor chip and the magnetism collecting member as small as possible and to make variations among products fall within a certain range and a manufacturing method for such a magnetic sensor. A magnetic sensor includes a sensor chip 20a mounted on a substrate 2 such that the element formation surface 20a is perpendicular to the substrate 2 and a magnetism collecting member 30 mounted on the substrate 2 such that the surface 31 faces the substrate 2 and the surface 32 faces the element formation surface 20a. The surfaces 31 and 32 of the magnetism collecting member 30 have flatness higher than that of the other surfaces thereof.
A magnetic sensor comprising:
Dependencies are inferred from the claim text.