System and method to weight defects with co-located modeled faults

A screening system for generating defect criticality comprising:

• a controller communicatively coupled to one or more sample analysis sub-systems, wherein the one or more sample analysis sub-systems comprise at least one test sub-system and at least one inline characterization sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
• identify defect results including a defect and a defect location of the defect;
• receive fault test recipes, wherein each fault test recipe is configured to test one or more of a plurality of potential faults at a plurality of testing locations;
• and
• identify a plurality of N-detect parameters, wherein each N-detect parameter of the plurality of N-detect parameters is associated with a testing location of a potential fault of the plurality of potential faults and is based on a countable number of times the fault test recipes are configured to test the potential fault;
• determine a plurality of weighting parameters based on the plurality of N-detect parameters, wherein the plurality of weighting parameters are associated with the plurality of testing locations;
• generate the defect criticality for the defect based on at least:
• a proximity between the plurality of testing locations of the plurality of potential faults and the defect location of the defect;
• and
• the plurality of weighting parameters associated with the plurality of testing locations.