Device for detecting particulate and one or more gases in the air

An apparatus comprising a MEMS device, the MEMS device including:

• a first semiconductor body having a first surface;
• a second semiconductor body having a second surface facing the first surface of the first semiconductor body;
• a first spacer element and a second spacer element between the first surface of the first semiconductor body and the second surface of the second semiconductor body;
• a first duct between the first and second semiconductor bodies and between the first and second spacer elements;
• a first emitter unit on the first semiconductor body, the first emitter unit including a first membrane suspended over a first buried cavity in the first semiconductor body;
• and
• a first particulate detection unit on the second semiconductor body, the first particulate detection unit including a second membrane suspended over a second buried cavity in the second semiconductor body, the first membrane facing the second membrane through the first duct.

A method for manufacturing a MEMS device, comprising:

• forming a first spacer element and a second spacer element between respective first surfaces of a first semiconductor body and of a second semiconductor body, wherein the first and second semiconductor bodies and the first and second spacer elements form walls of a first duct, which has a main extension direction and has a first opening and a second opening opposite to one another in the main extension direction;
• and
• forming at least one of:
• a first particulate sensor including a first emitter unit configured to generate an acoustic wave in the first duct and a first particulate-detection unit configured to detect a particulate present in the first duct, wherein the first emitter unit is on the first semiconductor body and the first particulate-detection unit is on the second semiconductor body, the first emitter unit and the first particulate-detection unit facing one another through the first duct;
• and
• a first gas sensor, on one of the first semiconductor body or the second semiconductor body, facing the first duct, and configured to detect a gas in air present in the first duct.