US 11,898,975 B2 · Electron spectrometer

Abstract

The electron spectrometer includes an excitation part 100 irradiating a sample with an energy beam, an orbiting part 10 causing electrons emitted from the sample irradiated with the energy beam to orbit, and a detection part 120 detecting the electrons released from the orbiting part 10, in which the orbiting part 10 includes a plurality of pairs of electrodes, the plurality of pairs of electrodes cause the electrons to orbit when an applied voltage is controlled, a part of the plurality of pairs of electrodes are pairs of electrodes to catch which catch the electrons into the orbiting part 10 when an applied voltage is controlled, and a part of the plurality of pairs of electrodes are pairs of electrodes to release which release the electrons from the orbiting part 10 when an applied voltage is controlled.

Claims11

Dependent claims

An electron spectrometer comprising:

an excitation part irradiating a sample with an energy beam;
an orbiting part causing electrons emitted from the sample irradiated with the energy beam to orbit;
and
a detection part detecting the electrons released from the orbiting part, wherein
the orbiting part includes a plurality of pairs of electrodes,
the plurality of pairs of electrodes cause the electrons to orbit when an applied voltage is controlled,
a part of the plurality of pairs of electrodes are pairs of electrodes to catch which catch the electrons into the orbiting part when an applied voltage is controlled, and
a part of the plurality of pairs of electrodes are pairs of electrodes to release which release the electrons from the orbiting part when an applied voltage is controlled;
and
further comprising a bunch compression part which reduces a time spread of an electron bunch, which is a bunch of electrons, by changing at least one of a velocity and a trajectory of the electrons.

7 more elements

Dependencies are inferred from the claim text.

Electron spectrometer

Life of this patent

Electron spectrometer

Life of this patent

Abstract

Claims11