Charged particle beam device, computer, and signal processing method for charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsHiroshi Oinuma, Wen Li, Masashi Wada
Life of this patent
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Abstract
A charged particle beam device includes a detector 109 converting a photon emitted by a scintillator into an electric signal and a signal processing unit 110 processing the electric signal from the detector 109. The signal processing unit 110 detects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.
Claims14
A charged particle beam device comprising:
- a detector configured to convert a photon emitted by a scintillator into an electrical signal;
- and
- a first signal processor coupled with the detector and including a first microcontroller configured to:
- receive the electrical signal from the detector;
- detect a peak position of the electrical signal, a steepness of a rising section associated with the peak position, and a steepness of a falling section associated with the peak position;
- classify the peak position based on the steepness of the rising section and the steepness of the falling section;
- and
- form a detection image based on the classification of the peak position.
An image detector comprising:
- a memory storing, as a target signal, an electrical signal received from a detector of a charged particle beam device or a pixel signal representing a change in luminance of a detection image generated based on the electrical signal;
- and
- a processor configured to
- detect a peak position of the target signal, a steepness of a rising section associated with the peak position, and a steepness of a falling section associated with the peak position;
- classify the peak position based on the steepness of the rising section and the steepness of the falling section;
- and
- form a detection image based on the classification of the peak position.
A signal processing method for a charged particle beam device, comprising:
- reading a target signal from a memory storing, as the target signal, an electrical signal from a detector of a charged particle beam device or a pixel signal representing a change in luminance of a detection image generated based on the electrical signal;
- detecting a peak position of the target signal, a steepness of a rising section associated with the peak position, and a steepness of a falling section associated with the peak position;
- classifying the peak position based on the steepness of the rising section and the steepness of the falling section;
- and
- forming a detection image based on the classification of the peak position.
Dependencies are inferred from the claim text.