Leak detection system and inspection method for the system
AssigneeEbara Corporation
InventorsToru Maruyama, Mitsunori Komatsu, Keisuke Kamiki
Life of this patent
Estimating the term…
Abstract
A method of inspecting a leak detection system in a short time is disclosed. The leak detection system includes a leak detection line, an on-off valve, a flow mater, an operation controller configured to detect a fluid leak from a fluid line based on a first flow rate measured by the flow mater, a drain line, and a drain valve attached to the drain line. The inspection method includes: opening the on-off valve and the drain valve, with a supply valve and a return valve closed; measuring a second flow rate of fluid in the leak detection line by the flow mater; and determining that the leak detection system has a defect when the second flow rate is lower than a predetermined reference value.
Claims10
An inspection method for use in a leak detection system configured to detect a fluid leak from a fluid line, the leak detection system including:
- a leak detection line coupled to the fluid line extending between a supply valve and a return valve;
- an on-off valve attached to the leak detection line;
- a flow meter configured to measure a flow rate of fluid flowing through the leak detection line;
- an operation controller configured to detect the fluid leak from the fluid line based on a first flow rate measured by the flow meter;
- a drain line communicating with the fluid line and the leak detection line, the drain line being located downstream of the flow meter;
- and
- a drain valve attached to the drain line, the method comprising:
- measuring a second flow rate of a fluid in the leak detection line of the leak detection system by the flow meter;
- and
- determining that the leak detection system has a defect when the second flow rate is lower than a predetermined reference value.
A leak detection system for detecting a fluid leak from a fluid line, comprising:
- a leak detection line coupled to the fluid line extending between a supply valve and a return valve;
- an on-off valve attached to the leak detection line;
- a flow meter configured to measure a flow rate of fluid flowing through the leak detection line;
- an operation controller configured to detect the fluid leak from the fluid line based on a first flow rate measured by the flow meter;
- a drain line communicating with the fluid line and the leak detection line, the drain line being located downstream of the flow meter;
- and
- a drain valve attached to the drain line,
- the operation controller being configured to:
- close the supply valve and the return valve;
- open the on-off valve and the drain valve;
- obtain, from the flow meter, a measured value of a second flow rate of fluid in the leak detection line;
- and
- determine that the leak detection system has a defect when the second flow rate is lower than a predetermined reference value.
Dependencies are inferred from the claim text.