Inspection apparatus and methods for precision vibration-isolation tabletops
AssigneeTechnical Manufacturing Corporation
InventorsAlexander B. V. Moutafis, Luc Owens Robitaille
Life of this patent
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Abstract
Apparatus and methods to automatically inspect precision tabletops used for vibration isolation are described. An inspection head having an imaging device and/or perturbing device can be positioned automatically at a plurality of locations over a precision tabletop. The inspection head can further include a distance sensor that can be used to determine a flatness of a portion or all of a surface of the precision tabletop. The inspection head may further include marking apparatus to automatically mark non-compliant features formed on the precision tabletop.
Claims23
A vibration-isolation inspection system comprising:
- an inspection head having an imaging array and a perturbing device that imparts mechanical energy to a precision vibration-isolation tabletop;
- and
- a system controller configured to control motion of the inspection head with respect to a surface of the precision vibration-isolation tabletop, wherein the system controller is configured to produce data indicating vibration-damping characteristics at a plurality of locations on the surface of the precision vibration-isolation tabletop.
A method of inspecting a precision vibration-isolation tabletop, the method comprising:
- automatically positioning an inspection head at a first location over the precision vibration-isolation tabletop;
- obtaining an image of a portion of a surface of the precision vibration-isolation tabletop;
- automatically imparting an impulse to the surface with an impact hammer;
- receiving sensor information indicating an effect of the impulse on the surface;
- automatically positioning the inspection head at a plurality of locations over the precision vibration-isolation tabletop;
- measuring a plurality of distances to the surface from the inspection head at the plurality of locations over the precision vibration-isolation tabletop;
- and
- determining a flatness of the surface based on the plurality of distances.
A method of inspecting a precision vibration-isolation tabletop, the method comprising:
- automatically positioning an inspection head at a plurality of locations over the precision vibration-isolation tabletop;
- obtaining information about physical characteristics of the precision vibration-isolation tabletop at the plurality of locations;
- providing the information to a user of the precision vibration-isolation tabletop measuring a distance between a location on a surface of the precision vibration-isolation tabletop and the inspection head at the plurality of locations;
- and
- referencing the measured distance to an optical reference plane.
Dependencies are inferred from the claim text.