Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same

An inspection apparatus comprising:

• an input optical system configured to irradiate a wafer with an input beam;
• and
• a hyperspectral imaging (HSI) apparatus configured to generate a hyperspectral image based on an output beam that is generated by reflecting the input beam from the wafer,
• wherein the HSI apparatus comprises:
• a slit plate configured to introduce the output beam;
• an aspherical mirror configured to reflect the introduced output beam;
• a planar grating having a planar reflective surface configured to generate a plurality of split beams by splitting the output beam after its reflection by the aspherical mirror;
• and
• a camera configured to detect the plurality of split beams to obtain at least one of a two-dimensional HSI image and a 3-dimensional hyper-cube image,
• wherein the reflection of the output beam by the aspherical mirror is directly reflected to the grating from the aspherical mirror,
• wherein the grating provides the plurality of split beams directly to the aspherical mirror, and
• wherein the plurality of split beams are reflected by the aspherical mirror to be provided to the camera.

An inspection apparatus comprising:

• a dichroic mirror configured to split an output beam into a first output beam having a first wavelength band and a second output beam having a second wavelength band that is different from the first wavelength band;
• a first hyperspectral imaging (HSI) optical system, which comprises a first aspherical mirror configured to reflect the first output beam, a first planar grating having a planar reflective surface configured to generate a plurality of first split beams by reflecting the first output beam, and a first camera configured to receive the plurality of first split beams to obtain at least one of a two-dimensional HSI image and a 3-dimensional hyper-cube image;
• and
• a second HSI optical system, which comprises a second aspherical mirror configured to reflect the second output beam, a second grating configured to generate a plurality of second split beams by reflecting the second output beam, and a second camera configured to receive the plurality of second split beams to obtain at least one of a two-dimensional HSI image and a 3-dimensional hyper-cube image,
• wherein the reflection of the first output beam by the first aspherical mirror is directly reflected to the first planar grating from the first aspherical mirror,
• wherein the first planar grating provides the plurality of first split beams directly to the first aspherical mirror,
• wherein the plurality of first split beams are reflected by the first aspherical mirror to be provided to the first camera,
• wherein the reflection of the second output beam by the second aspherical mirror is directly reflected to the second grating from the second aspherical mirror,
• wherein the second grating provides the plurality of second split beams directly to the second aspherical mirror, and
• wherein the plurality of second split beams are reflected by the second aspherical mirror to be provided to the second camera.