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US 11,898,845 B2Granted
Micromachined multi-axis gyroscopes with reduced stress sensitivity
AssigneeSemiconductor Components Industries, LLC
InventorsCenk Acar, Brenton Simon, Sandipan Maity
Life of this patent
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Abstract
In a general aspect, a micromachined gyroscope can include a substrate and a static mass suspended in an x-y plane over the substrate by a plurality of anchors attached to the substrate. The static mass can be attached to the anchors by anchor suspension flexures. The micromachined gyroscope can include a dynamic mass surrounding the static mass and suspended from the static mass by one or more gyroscope suspension flexures.
Claims20
A micromachined gyroscope comprising:
- a substrate;
- a static mass suspended in an x-y plane over the substrate;
- a dynamic mass surrounding the static mass and suspended from the static mass;
- at least one out-of-plane sense electrode disposed on the substrate at an edge of the gyroscope;
- at least one in-plane drive electrode;
- and
- at least one in-plane drive sensing electrode, the at least on in-plane drive electrode and the at least one in-plane drive sensing electrode being disposed in a region of the gyroscope closer to a center of the gyroscope than the at least one out-of-plane sense electrode.
4 more elements
A micromachined gyroscope comprising:
- a substrate;
- a static mass suspended in an x-y plane over the substrate;
- a dynamic mass surrounding the static mass and suspended from the static mass;
- at least one out-of-plane rate sensing electrode disposed on the substrate at an edge of the gyroscope;
- and
- at least one in-plane rate sensing electrode, the at least one in-plane rate sensing electrode being disposed in a region of the gyroscope closer to a center of the gyroscope than the at least one out-of-plane rate sensing electrode.
3 more elements
Dependencies are inferred from the claim text.