Multi-zone air turn for transport of a flexible substrate
AssigneeApplied Materials, Inc.
InventorBernard Frey
Life of this patent
Estimating the term…
Abstract
Methods and apparatus for transporting a flexible substrate are provided. In one embodiment, an air turn is disclosed that includes a body, a porous cover disposed about a circumference of the body, and two seals. Each of the two seals are positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone. The second zone and third zone are each positioned outside of a respective seal. The body includes a first opening formed along a longitudinal axis of the body, and a plurality of second openings formed in the body at a position other than along the longitudinal axis.
Claims20
An air turn, comprising:
- a body;
- a porous cover disposed about a circumference of the body;
- and
- two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone, wherein:
- each of the second zone and the third zone is positioned outside of a respective seal;
- the body includes a first opening formed along a longitudinal axis of the body, the first opening comprises a transverse channel that is coupled to a central radial channel that extends from the transverse channel to an outer surface of the body;
- and
- the body includes a plurality of second openings formed at a position other than along the longitudinal axis.
An air turn, comprising:
- a body having a rod extending from an end of the body along a longitudinal axis thereof;
- a porous cover disposed about a circumference of the body;
- and
- two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a plurality of outer zones positioned outside of the each seal, wherein the body includes:
- a first opening formed along the longitudinal axis of the body, the first opening comprises a transverse channel that is coupled to a central radial channel that extends from the transverse channel to an outer surface of the body;
- and
- a plurality of second openings formed in the body at a position other than along the longitudinal axis.
An air turn, comprising:
- a body;
- a porous cover disposed about a circumference of the body;
- and
- two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone, wherein:
- each of the second zone and the third zone is positioned outside of a respective seal;
- the body includes a first opening formed along a longitudinal axis of the body;
- the body includes a plurality of second openings formed at a position other than along the longitudinal axis;
- and
- each of the plurality of second openings comprises a transversely oriented channel that is parallel to the longitudinal axis.
An air turn, comprising:
- a body having a rod extending from an end of the body along a longitudinal axis thereof;
- a porous cover disposed about a circumference of the body;
- and
- two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a plurality of outer zones positioned outside of the each seal, wherein the body includes:
- a first opening formed along the longitudinal axis of the body;
- and
- a plurality of second openings formed in the body at a position other than along the longitudinal axis, wherein each of the plurality of second openings comprises a transversely oriented channel that is parallel to the longitudinal axis.
Dependencies are inferred from the claim text.