Substrate for pattern formation

A pattern substrate comprising a substrate for pattern formation and a pattern portion, the substrate for pattern formation comprising:

• at least a base material and a perfluoro(poly)ether group-containing silane compound-derived portion, wherein
• the base material comprises at least one main face having a first region and a second region which is a region for pattern formation, adjacent to the first region,
• the perfluoro(poly)ether group-containing silane compound-derived portion is disposed in the first region,
• the pattern portion is disposed in the second region of the substrate for pattern formation, and
• the pattern portion comprises at least one selected from the group consisting of a metal and an oxide thereof,
• wherein the perfluoro(poly)ether group-containing silane compound is at least one perfluoropolyether group-containing silane compound represented by formula (A1), (A2), (B1), (B2), (C1), (C2), (D1) or (D2):
• wherein:
• each PFPE, at each occurrence, independently is a group represented by formula:
• —(OC6F12)a—(OC5F10)b—(OC4F8)c—(OC3F6)d—(OC2F4)e—(OCF2)f—
• wherein a, b, c, d, e and f are each independently an integer of 0 or more and 200 or less, the sum of a, b, c, d, e and f is at least 1, and the occurrence order of the respective repeating units in parentheses with a, b, c, d, e or f is not limited in the formula;
• each Rf, at each occurrence, independently represents an alkyl group having 1 to 16 carbon atoms, optionally substituted with one or more fluorine atoms;
• each R13, at each occurrence, independently represents a hydroxyl group or a hydrolyzable group;
• each R14, at each occurrence, independently represents a hydrogen atom or an alkyl group having 1 to 22 carbon atoms;
• each R11, at each occurrence, independently represents a hydrogen atom or a halogen atom;
• each R12, at each occurrence, independently represents a hydrogen atom or a lower alkyl group;
• n1 with respect to a (—SiR13n1R143-n1) unit is independently an integer of 0 to 3;
• provided that at least one n1 in formulae (A1), (A2), (B1) and (B2) is an integer of 1 to 3;
• each X1, at each occurrence, independently represents a single bond or a di- to decavalent organic group;
• each X2, at each occurrence, independently represents a single bond or a divalent organic group;
• each t, at each occurrence, is independently an integer of 1 to 10;
• each α1, at each occurrence, is independently an integer of 1 to 9;
• each α1′ is independently an integer of 1 to 9;
• each X3, at each occurrence, independently represents a single bond or a di- to decavalent organic group;
• each β1, at each occurrence, is independently an integer of 1 to 9;
• each β1′ is independently an integer of 1 to 9;
• each X5, at each occurrence, independently represents a single bond or a di- to decavalent organic group;
• each γ1, at each occurrence, is independently an integer of 1 to 9;
• each γ1′ is independently an integer of 1 to 9;
• each Ra, at each occurrence, independently represents —Z3—SiR71p1R72q1R73r1;
• each Z3, at each occurrence, independently represents an oxygen atom or a divalent organic group;
• each R71, at each occurrence, independently represents Ra′;
• Ra′ has the same meaning as Ra;
• the number of Si atoms linearly linked via a Z3 group in Ra is at most 5;
• each R72, at each occurrence, independently represents a hydroxyl group or a hydrolyzable group;
• each R73, at each occurrence, independently represents a hydrogen atom or a lower alkyl group;
• each p1, at each occurrence, is independently an integer of 0 to 3;
• each q1, at each occurrence, is independently an integer of 0 to 3;
• each r1, at each occurrence, is independently an integer of 0 to 3;
• provided that the sum of p1, q1 and r1 with respect to (—Z3—SiR71p1R72q1R73r1) is 3 and at least one q1 in formulae (C1) and (C2) is an integer of 1 to 3;
• each Rb, at each occurrence, independently represents a hydroxyl group or a hydrolyzable group;
• each Rc, at each occurrence, independently represents a hydrogen atom or a lower alkyl group;
• each k1, at each occurrence, is independently an integer of 0 to 3;
• each l1, at each occurrence, is independently an integer of 0 to 3;
• each m1, at each occurrence, is independently an integer of 0 to 3;
• provided that the sum of k1, l1 and m1 with respect to (SiRak1Rbl1Rcm1) is 3;
• each X7 independently represents a single bond or a di- to decavalent organic group;
• each δ1 is independently an integer of 1 to 9;
• each δ1′ is independently an integer of 1 to 9;
• each Rd, at each occurrence, independently represents —Z4—CR81p2R82q2R83r2;
• each Z4, at each occurrence, independently represents an oxygen atom or a divalent organic group;
• each R81, at each occurrence, independently represents Rd′;
• Rd′ has the same meaning as Rd;
• the number of C atoms linearly linked via a Z4 group in Rd is at most 5;
• each R82, at each occurrence, independently represents —Y—SiR85n2R863-n2;
• each Y, at each occurrence, independently represents a divalent organic group;
• each R85, at each occurrence, independently represents a hydroxyl group or a hydrolyzable group;
• each R86, at each occurrence, independently represents a hydrogen atom or a lower alkyl group;
• n2 with respect to a (—Y—SiR85n2R863-n2) unit independently represents an integer of 0 to 3;
• each R83, at each occurrence, independently represents a hydrogen atom or a lower alkyl group;
• each p2, at each occurrence, is independently an integer of 0 to 3;
• each q2, at each occurrence, is independently an integer of 0 to 3;
• each r2, at each occurrence, is independently an integer of 0 to 3;
• provided that the sum of p2, q2 and r2 with respect to (—Z4—CR81p2R82q2R83r2) is 3;
• each Re, at each occurrence, independently represents —Y—SiR85n2R863-n2;
• each Rf, at each occurrence, independently represents a hydrogen atom or a lower alkyl group;
• each k2, at each occurrence, is independently an integer of 0 to 3;
• each l2, at each occurrence, is independently an integer of 0 to 3;
• and
• each m2, at each occurrence, is independently an integer of 0 to 3;
• provided that the sum of k2, l2 and m2 with respect to (CRdk2Rel2Rfm2) is 3 and two or more groups represented by —Y—SiR85n2R863-n2 in which n2 is 1 or more are present in formulae (D1) and (D2).