# US 11,897,817 B2 · Ceramic sintered body and substrate for semiconductor device

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- Number: US 11,897,817 B2
- Document ID: US11897817B2
- Status: Granted
- Kind: B2
- Application number: 17/317,986
- Filed: 2021-05-12
- Published: 2021-08-26
- Granted: 2024-02-13
- Earliest claimed: 2018-12-06
- Assignees: NGK Insulators, Ltd.; Ngk Electronics Devices, Inc.
- Applicants: Ngk Insulators, Ltd.; Ngk Electronics Devices, Inc.
- Inventors: Yuji Umeda; Jyunji Oogami
- Web page: https://patentgrep.com/patent/US11897817B2

## CPC

- C04B 37/021: {in a direct manner, e.g. direct copper bonding [DCB]}
- C04B 35/119: with zirconium oxide
- H10W 40/255: {having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates}
- C04B 2235/3201: Alkali metal oxides or oxide-forming salts thereof
- C04B 2235/3206: Magnesium oxides or oxide-forming salts thereof
- C04B 2235/3208: Calcium oxide or oxide-forming salts thereof, e.g. lime
- C04B 2235/3222: Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
- C04B 2235/3225: Yttrium oxide or oxide-forming salts thereof
- C04B 2235/3244: Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
- C04B 2235/3418: Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
- C04B 2235/6567: Treatment time
- C04B 2235/6583: Oxygen containing atmosphere, e.g. with changing oxygen pressures
- C04B 2235/76: Crystal structural characteristics, e.g. symmetry
- C04B 2235/765: Tetragonal symmetry
- C04B 2235/785: Submicron sized grains, i.e. from 0,1 to 1 micron
- C04B 2235/786: Micrometer sized grains, i.e. from 1 to 100 micron
- C04B 2235/95: Products characterised by their size, e.g. microceramics
- C04B 2235/96: Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B 2237/343: Alumina or aluminates
- C04B 2237/402: Aluminium
- C04B 2237/407: Copper
- C04B 2237/54: Oxidising the surface before joining
- H10W 70/692: Ceramics or glasses
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

In a ceramic sintered body, the Zr content is 17.5 mass %-23.5 mass % in terms of ZrO2, the Hf content is 0.3 mass %-0.5 mass % in terms of HfO2, the Al content is 74.3 mass %-80.9 mass % in terms of Al2O3, the Y content is 0.8 mass %-1.9 mass % in terms of Y2O3, the Mg content is 0.1 mass %-0.8 mass % in terms of MgO, the Si content is 0.1 mass %- and 1.5 mass % in terms of SiO2, and the Ca content is 0.03 mass %-0.35 mass % in terms of CaO. The total content of Na and K is 0.01 mass %-0.10 mass %, when the K content is converted to K2O and the Na content is converted to Na2O. The balance content is 0.05 mass % or less in terms of oxide.

## Claims

### Claim 1

A ceramic sintered body joined to a copper plate or an aluminum plate, wherein
a Zr content is 17.5 mass % or more and 23.5 mass % or less in terms of ZrO2,
an Hf content is 0.3 mass % or more and 0.5 mass % or less in terms of HfO2,
an Al content is 74.3 mass % or more and 80.9 mass % or less in terms of Al2O3,
a Y content is 0.8 mass % or more and 1.9 mass % or less in terms of Y2O3,
an Mg content is 0.1 mass % or more and 0.8 mass % or less in terms of MgO,
a Si content is 0.1 mass % or more and 1.5 mass % or less in terms of SiO2,
a Ca content is 0.03 mass % or more and 0.35 mass % or less in terms of CaO,
a total content of Na and K is 0.01 mass % or more and 0.10 mass % or less when the Na content is converted to Na2O and the K content is converted to K2O,
a balance content is 0.05 mass % or less in terms of oxide, and
a sum of the Mg content in terms of MgO, the Si content in terms of SiO2, the Ca content in terms of CaO, the Na content in terms of Na2O, the K content in terms of K2O, and the balance content is 0.3 mass % or more and 2.0 mass % or less.

### Claim 2 (depends on 1)

The ceramic sintered body according to claim 1 containing an Al2O3 crystal phase and a ZrO2 crystal phase as crystal phases, wherein
the ZrO2 crystal phase contains a monoclinic phase and a tetragonal phase as crystal structures,
a ratio of a peak intensity of the monoclinic phase to a sum of the peak intensity of the monoclinic phase and a peak intensity of the tetragonal phase is 12% or less in a X-ray diffraction pattern.

### Claim 3 (depends on 1)

The ceramic sintered body according to claim 1 containing an Al2O3 crystal phase and a ZrO2 crystal phase as crystal phases, wherein
the ZrO2 crystal phase contains a monoclinic phase and a tetragonal phase as crystal structures,
a ratio of a peak intensity of the monoclinic phase to a sum of the peak intensity of the monoclinic phase and a peak intensity of the tetragonal phase is 7% or less in a X-ray diffraction pattern.

### Claim 4 (depends on 1)

The ceramic sintered body according to claim 1 containing MgAl2O4 crystal phase as a crystal phase, wherein
a ratio of a peak intensity of MgAl2O4 to a peak intensity of Al2O3 is 4% or less in a X-ray diffraction pattern.

### Claim 5 (depends on 1)

The ceramic sintered body according to claim 1 containing MgAl2O4 crystal phase as a crystal phase, wherein
a ratio of a peak intensity of MgAl2O4 to a peak intensity of Al2O3 is 0.5% or more and 3.5% or less in a X-ray diffraction pattern.

### Claim 6 (depends on 1)

The ceramic sintered body according to claim 1, wherein
an average particle size of ZrO2 is 0.6 μm or more and 1.5 μm or less.

### Claim 7 (depends on 1)

The ceramic sintered body according to claim 1, wherein
an average particle size of Al2O3 is 1.6 μm or more and 2.5 μm or less.

### Claim 8 (depends on 1)

The ceramic sintered body according to claim 1, wherein
a ratio of the Y content in terms of Y2O3 to the Zr content in terms of ZrO2 is 4.5% or more and 7.9% or less.

### Claim 9

A substrate for a semiconductor device on which electronic components mounted, the substrate comprising:
a ceramic sintered body; and
a copper plate or an aluminum plate joined to the ceramic sintered body, wherein
in the ceramic sintered body,
a Zr content is 17.5 mass % or more and 23.5 mass % or less in terms of ZrO2,
an Hf content is 0.3 mass % or more and 0.5 mass % or less in terms of HfO2,
an Al content is 74.3 mass % or more and 80.9 mass % or less in terms of Al2O3,
a Y content is 0.8 mass % or more and 1.9 mass % or less in terms of Y2O3,
an Mg content is 0.1 mass % or more and 0.8 mass % or less in terms of MgO,
an Si content is 0.1 mass % or more and 1.5 mass % or less in terms of SiO2,
a Ca content is 0.03 mass % or more and 0.35 mass % or less in terms of CaO,
a total content of Na and K is 0.01 mass % or more and 0.10 mass % or less when the Na content is converted to Na2O and the K content is converted to K2O,
a balance content is 0.05 mass % or less in terms of oxide, and
a sum of the Mg content in terms of MgO, the Si content in terms of SiO2, the Ca content in terms of CaO, the Na content in terms of Na2O, the K content in terms of K2O, and the balance content is 0.3 mass % or more and 2.0 mass % or less.