# US 11,897,790 B2 · Method for producing ultrapure water, ultrapure water production system, and ion exchanger-filled module

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- Number: US 11,897,790 B2
- Document ID: US11897790B2
- Status: Granted
- Kind: B2
- Application number: 17/053,259
- Filed: 2019-05-15
- Published: 2021-08-12
- Granted: 2024-02-13
- Earliest claimed: 2018-05-17
- Assignees: Organo Corporation
- Applicants: Organo Corporation
- Inventors: Kyohei Tsutano; Hitoshi Takada
- Web page: https://patentgrep.com/patent/US11897790B2

## CPC

- C02F 1/42: by ion-exchange (ion-exchange in general B01J)
- B01J 39/05: in the strongly acidic form
- B01J 39/20: obtained by reactions only involving unsaturated carbon-to-carbon bonds
- B01J 41/04: Processes using organic exchangers
- B01J 41/05: in the strongly basic form
- B01J 41/14: obtained by reactions only involving unsaturated carbon-to-carbon bonds
- B01J 45/00: Ion-exchange in which a complex or a chelate is formed; Use of material as complex or chelate forming ion-exchangers; Treatment of material for improving the complex or chelate forming ion-exchange properties (ion-exchange chromatography processes B01D15/36)
- B01J 47/022: characterised by the construction of the column or container
- B01J 47/024: where the ion-exchangers are in a removable cartridge
- B01J 47/026: using columns or beds of different ion exchange materials in series
- B01J 47/028: with alternately arranged cationic and anionic exchangers
- B01J 47/04: Mixed-bed processes
- C02F 2001/422: {using anionic exchangers}
- C02F 2001/425: {using cation exchangers}
- C02F 2101/103: {Arsenic compounds}
- C02F 2101/108: {Boron compounds}
- C02F 2101/20: Heavy metals or heavy metal compounds
- C02F 2101/203: {Iron or iron compound}
- C02F 2101/22: Chromium or chromium compounds, e.g. chromates
- C02F 2103/04: for obtaining ultra-pure water
- C02F 2103/346: {from semiconductor processing, e.g. waste water from polishing of wafers}
- C02F 2201/006: Cartridges
- C02F: TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE (separation in general B01D; special arrangements on waterborne vessels of installations for treating water, waste water or sewage, e.g. for producing fresh water, B63J; adding materials to water to prevent corrosion C23F; treating radioactively-contaminated liquids G21F9/04; regeneration of reactants for recirculation into processes, see the relevant places for the processes)
- B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS

## Abstract

Provided is a method for producing ultrapure water to supply, to a use point, ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus, wherein the raw material water for ultrapure water production contains at least one or more elements selected from B, As, Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb, and wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and water to be treated is passed through the ion exchanger-filled module for treatment.

## Claims

### Claim 1

A method for producing ultrapure water to supply, to a use point, the ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus,
wherein the raw material water for ultrapure water production contains metal impurities of both of:
at least one element selected from the group consisting of B and As, and
at least one element selected from the group consisting of Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb,
wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and the raw material water to be treated is passed through the ion exchanger-filled module for treatment, and
wherein the raw material water to be treated is passed through the monolithic organic porous anion exchanger-filled module at a water passing speed SV of greater than or equal to 1274 h−1 and less than or equal to 20000 h−1 to remove the metal impurities from the raw material water and produce the ultrapure water.

### Claim 2 (depends on 1)

The method for producing ultrapure water according to claim 1, wherein all of the raw material water for ultrapure water production or a part of another raw material water to be mixed with the raw material water for ultrapure water production is collected washing water that has been used for washing semiconductors in a semiconductor production process.

### Claim 3 (depends on 1)

The method for producing ultrapure water according to claim 1, wherein the monolithic organic porous anion exchanger is formed of a continuous framework phase and a continuous pore phase; the continuous framework phase has a thickness of a continuous framework of 1 to 100 μm, the continuous pore phase has an average diameter of continuous pores of 1 to 1000 μm, and a total pore volume of 0.5 to 50 mL/g; the monolithic organic porous anion exchanger has an anion exchange capacity of 0.1 to 1.0 mg equivalent/mL in a wet state; and the monolithic organic porous anion exchanger has anion exchange groups that are uniformly distributed in the monolithic organic porous anion exchanger.

### Claim 4 (depends on 3)

The method for producing ultrapure water according to claim 3, wherein the monolithic organic porous anion exchanger is a co-continuous structural material formed of a three dimensionally continuous framework by intertwining the continuous framework phase and the continuous pore phase, the monolithic organic porous anion exchanger comprising an aromatic vinyl polymer containing 0.1 to 5.0 mol % of crosslinked structural units among all the entire constituent units provided in the monolithic organic porous anion exchanger, with an average thickness of 1 to 60 μm in a dry state, and three dimensionally continuous pores in the three dimensionally continuous framework with an average diameter of 10 to 200 μm in a dry state; the monolithic organic porous anion exchanger has a total pore volume of 0.5 to 10 mL/g in a dry state; and the monolithic organic porous anion exchanger has an anion exchange capacity per volume in a water wet state of 0.2 to 1.0 mg equivalent/mL.

### Claim 5 (depends on 1)

The method for producing ultrapure water according to claim 1, wherein the ion exchanger-filled module is filled with a cation exchanger in a stage preceding or subsequent to the monolithic organic porous anion exchanger.